Variable Thickness Mask Sheet for OLED Evaporation Shadow Effect

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Solution Overview

Problem

Conventional fine metal masks used in organic light emitting diode display manufacturing suffer from significant shadow effects during the evaporation process, leading to poorer film quality due to their uniform thickness and structure, which affects the accuracy and resolution of the patterns formed.

Innovation Solution

A mask sheet with a light shielding region and a light transmitting region, featuring an adjoining portion with a reduced thickness edge and a thicker inner portion, where the thickness of the inner edge adjacent to the light transmitting region is decreased, and the width of the adjoining portion is within 1 mm to 2 mm, reducing the shadow effect and improving film quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a conventional fine metal mask with uniform thickness is used, then the mask sheet maintains structural strength, but significant shadow effects occur during evaporation leading to poor film quality

Engineering Contradiction:
Improvefilm qualityVSAvoidshadow effect
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The mask sheet applies local quality by creating different thickness regions within the light shielding layer. The adjoining portion has a first thickness while the inner portion has a second thickness greater than the first. This localized thickness variation reduces shadow effects at the boundary between light shielding and light transmitting regions while maintaining adequate shielding in inner regions.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The invention transitions from a two-dimensional uniform thickness mask to a three-dimensional variable thickness structure. By introducing thickness as a varying parameter across different regions (first thickness at adjoining portion, second thickness at inner portion), the mask achieves better optical performance without compromising structural integrity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If the thickness of the light shielding region is reduced to minimize shadow effects, then film quality improves, but the mask sheet strength may be compromised

Engineering Contradiction:
Improvepattern accuracyVSAvoidmask sheet strength
Core Design Contradiction:
Manufacturing precisionVSStrength

Solution Approach 1:

The mask sheet applies local quality by creating different thickness regions within the light shielding layer. The adjoining portion has a first thickness while the inner portion has a second thickness greater than the first. This localized thickness variation reduces shadow effects at the boundary between light shielding and light transmitting regions while maintaining adequate shielding in inner regions.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The invention transitions from a two-dimensional uniform thickness mask to a three-dimensional variable thickness structure. By introducing thickness as a varying parameter across different regions (first thickness at adjoining portion, second thickness at inner portion), the mask achieves better optical performance without compromising structural integrity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of manufacture

If a uniform thickness light shielding region is used, then manufacturing is simpler, but shadow effects reduce pattern accuracy and resolution

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidpattern resolution
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The mask sheet applies local quality by creating different thickness regions within the light shielding layer. The adjoining portion has a first thickness while the inner portion has a second thickness greater than the first. This localized thickness variation reduces shadow effects at the boundary between light shielding and light transmitting regions while maintaining adequate shielding in inner regions.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The modified mask sheet design reduces the shadow effect region, enhancing the quality of the evaporated film and maintaining the strength of the mask sheet, while allowing for improved pattern accuracy and resolution in high-resolution display manufacturing.

Implementation Method 1

a light shielding region and a light transmitting region, wherein the light shielding region includes an adjoining portion which is located at a position of the light shielding region where adjoins the light transmitting region

Methodology Applied
Scientific EffectLight shielding: Absorption (EM radiation)

Data Source

PatentUS10185216B2Mask sheet and method of manufacturing mask sheet
Publication Date: 2019.01.22 BOE TECHNOLOGY GROUP CO LTD
  • US10185216B2 patent drawing
  • US10185216B2 patent drawing
  • US10185216B2 patent drawing

AI summary

The present disclosure discloses a mask sheet and a method of manufacturing a mask sheet, which belong to display technique field. The mask sheet includes a light shielding region and a light transmitting region. The light shielding region includes an adjoining portion which is located at a position where the light shielding region adjoins the light transmitting region, and thickness of other portion of the light shielding region of the mask sheet except the adjoining portion is greater than that of the adjoining portion of the mask sheet.