Matrix Heater Support Unit for Isolated Current Measurement
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional temperature control methods using micro heaters face challenges in accurately measuring current for target heaters due to interference from adjacent heaters, leading to inaccurate temperature control.
Innovation Solution
A support unit with a matrix of heaters and a power supply system that uses switches connected to rows and columns to control current, including first and second switches in parallel, allows for precise current measurement and control of target heaters.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a simple circuit structure without diodes is used for matrix heaters, then device complexity is reduced, but measurement precision of target heater current deteriorates due to interference from adjacent heaters
Solution Approach 1:
The heater matrix is divided into independently controllable rows and columns using switch arrays. Each heater element can be selectively activated by controlling the intersection of specific row and column switches, enabling isolated measurement of target heater current without interference from adjacent heaters.
Solution Approach 2:
Switch arrays are introduced as intermediary components between the power supply and heater elements. These switches act as mediators that can selectively connect or disconnect specific heater elements, allowing precise current measurement for target heaters while blocking current to adjacent heaters during measurement.
2Device complexity
If conventional voltage and current sensing is used for temperature control, then device complexity is minimized, but temperature control accuracy deteriorates due to inability to isolate target heater measurements
Solution Approach 1:
The control system segments the heater matrix into independently controllable units using row and column switch arrays. This segmentation enables the control unit to selectively activate and measure only the target heater element, achieving precise temperature control for specific regions without interference from other heaters.
Solution Approach 2:
The system implements feedback control by continuously measuring the current through the target heater using the switch array isolation method, comparing it with desired temperature parameters, and adjusting the power supply output accordingly to maintain precise temperature control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables accurate temperature control of target heaters by isolating current flow to the target region, allowing for precise current measurement and feedback control.
Implementation Method 1
a plurality of heaters disposed in a matrix form in the support unit to heat a substrate
Data Source
AI summary
A support unit may include a plurality of heaters disposed in a matrix form in the support unit to heat a substrate, and a power supply unit for supplying power to the plurality of heaters, wherein a current applied to the plurality of heaters is controlled by switches connected to rows and columns of the matrix, respectively, and the switches connected to the rows of the matrix include first switches capable of controlling the current applied to the rows of the matrix and second switches connected in parallel with the first switches.