Fluid-Tight Membrane Cell for Semiconductor Electrochemical Reaction
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Solution Overview
Problem
Existing devices for electrochemical reactions on semiconductor substrates require large volumes of electrolyte, leading to high costs and the need for customized cell shapes, which increases manufacturing expenses and limits the efficiency of the reaction across varying substrate geometries.
Innovation Solution
A device comprising a cell with a fluid-tight membrane and nozzle system that reduces the volume of electrolyte needed by creating a sealed chamber, allowing for flexible adaptation to different substrate geometries and using inert fluids to minimize reaction volume, while maintaining uniformity through light activation and electric polarization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a large volume of electrolyte is used to immerse the substrate, then uniform electrochemical reaction is achieved, but the cost of electrolyte and device complexity increase
Solution Approach 1:
The cell is divided into two distinct chambers by a fluid-tight membrane: a first chamber containing the substrate and electrolyte for the electrochemical reaction, and a second chamber containing only the counter electrode. This segmentation allows the electrolyte volume to be limited to what is necessary for substrate immersion and reaction uniformity, rather than requiring enough electrolyte to fill the entire cell volume.
Solution Approach 2:
A fluid-tight membrane is used to separate the two chambers while allowing the system to maintain pressure equilibrium through a communication channel. The membrane enables precise control over electrolyte volume in the first chamber without compromising the structural integrity or functionality of the overall cell system.
2Manufacturing precision
If the cell shape is adapted to substrate shape, then reaction uniformity improves, but manufacturing cost and device complexity increase
Solution Approach 1:
The cell is designed with a universal geometry that can accommodate multiple substrate shapes and sizes. The fluid-tight membrane and communication channel design allow the same cell structure to be used for planar, curved, or irregularly shaped substrates, eliminating the need to manufacture custom-shaped cells for each substrate type while maintaining reaction uniformity.
Solution Approach 2:
The system uses a dynamic fluid communication channel that allows pressure equalization between chambers, enabling the cell to adapt to different substrate geometries without requiring rigid structural modifications. This dynamic approach maintains reaction uniformity across various substrate shapes while keeping the cell structure standardized.
3Reliability
If the substrate is introduced vertically into the cell, then immersion is achieved, but the cell requires customized shape adaptation increasing manufacturing cost
Solution Approach 1:
By segmenting the cell into two chambers separated by a membrane, the design allows vertical substrate introduction in the first chamber without requiring the entire cell to be customized. The membrane acts as a flexible barrier that accommodates vertical substrate placement while maintaining a standardized, manufacturable cell structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces the volume of electrolyte required for electrochemical reactions, adapts to various substrate geometries without modifying the cell shape, and integrates cost-effective components, ensuring uniform chemical reactions across different substrates while minimizing contact risks and operational costs.
Implementation Method 1
a fluid-tight membrane (20) fixed to an inner wall (12) of the cell so as to define with said inner wall a fluid-tight chamber
Implementation Method 2
a nozzle (24) configured to supply the chamber with a fluid
Implementation Method 3
it may be necessary to activate the reaction by illumination of the semiconductor substrate to activate the surface of the semiconductor substrate by exciting the charge carriers of the valence band of the semiconductor
Implementation Method 4
The surface of the substrate is then polarized using an electrical power supply at a potential allowing the envisaged reaction to be carried out
Data Source
Figure 1
Figure 2
Figure 3a~3b
AI summary
The invention relates to a device (1) for carrying out a chemical reaction on a substrate (3) having a surface (2) to be treated, typically a surface (2) of a semiconductor substrate (3), said device comprising: - a cell (10) comprising an inner wall (12) defining an enclosure (11) configured to receive a chemical bath (4), - a fluid-tight membrane (20), fixed on the inner wall (12) of the cell (10) so as to define with said inner wall (12) a fluid-tight chamber (22), and - a nozzle (24) configured to supply the chamber (22) with a fluid.