Movable Membrane Interface for Immersion Objective Positioning
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Solution Overview
Problem
Existing 3D direct writing laser lithography methods face challenges with immersion media and photoresists due to contamination, damage to objectives, limited working distance, introduction of forces, and difficulties in automated objective change, stability of optical systems, and handling of structures with high surface topography.
Innovation Solution
An apparatus and method using a movable membrane between the objective and the object, allowing for a well-defined optical interface with minimal interference, reducing contamination risks, and enabling precise positioning and exchange of objectives without disturbing the substrate, while maintaining a large usable working distance and compensating for aberrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a thin cover glass is used to achieve a well-defined optical interface, then optical quality is improved, but the maximum structure height is limited
Solution Approach 1:
The patent makes the cover glass movable relative to the objective lens, allowing the distance between them to be adjusted. This dynamic configuration enables the system to accommodate structures of varying heights while maintaining optimal optical coupling, resolving the contradiction between optical quality and structure height capability
Solution Approach 2:
The system separates the cover glass from the objective lens assembly, allowing independent positioning of each component. This segmentation enables the cover glass to be moved to different distances from the objective, facilitating both high optical quality and accommodation of tall structures
2Adaptability or versatility
If the objective is moved relative to the substrate to write structures of any height, then structure height flexibility is improved, but forces are introduced into the photoresist
Solution Approach 1:
The patent implements dynamic movement of the cover glass relative to the objective lens, allowing the system to accommodate structures of any height by adjusting the cover glass position rather than moving the objective relative to the substrate, thereby avoiding introduction of forces into the photoresist
Solution Approach 2:
The movable cover glass acts as an intermediary element between the objective and substrate, allowing height adjustment without direct relative movement between the objective and substrate that would generate harmful forces in the photoresist
3Manufacturing precision
If the cover glass is fastened to the objective, then objective-positioning accuracy is improved, but automated objective exchange becomes difficult
Solution Approach 1:
The patent segments the cover glass from the objective lens, allowing the objective to be exchanged independently while the cover glass remains in place or is easily repositioned. This segmentation enables automated objective exchange while maintaining positioning accuracy through the movable cover glass mechanism
Solution Approach 2:
The movable cover glass provides dynamic positioning capability that maintains objective-positioning accuracy even when objectives are exchanged, as the cover glass can be repositioned to compensate for different objective characteristics
4Illumination intensity
If a short working distance objective is used to increase numerical aperture, then peak optical intensity is improved, but the usable working distance is reduced
Solution Approach 1:
The patent introduces a movable cover glass that can be positioned at different distances from the objective lens, effectively extending the usable working distance while maintaining the high numerical aperture and peak optical intensity provided by the short working distance objective
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates high-resolution 3D lithography and optical characterization with reduced contamination, improved objective stability, and flexibility in handling various photoresists and structures with complex topographies, enhancing throughput and precision.
Implementation Method 1
the membrane has a portion configured for penetration by the light
Implementation Method 2
immersion lithography methods are often used, in which the light used for patterning is radiated into and focused in a single immersion medium or an arrangement of a plurality of immersion media, each of which has a refractive index of n greater than 1
Implementation Method 3
very high optical intensities can briefly be achieved in this focus volume, which in a limited spatial area can lead to multiphoton absorption and thus to initiation of a polymerization reaction
Implementation Method 4
multiphoton absorption and thus to initiation of a polymerization reaction
Data Source
AI summary
The invention relates to an apparatus (10) and a method for optically characterizing or processing an object (60), and to an object transport unit (55). The apparatus (10) comprisesan object carrier (50) for receiving an object (60);an optical characterization or processing unit (15), comprising at least one device for producing or for receiving light (140) and an objective (40) for exposing the object (60) using the light (140) or for capturing the light (140) from the object (60), wherein the objective (40) has an end face (46) facing the object carrier (50), wherein the end face (46) has an edge (47), wherein the objective (40) further defines an optical axis (502);at least one membrane (100) introduced between the objective (40) and the object carrier (50), wherein the membrane (100) has a portion (120) configured for penetration by the light (140), wherein at least the portion (120) of the membrane (100) is movable in the axial direction with respect to the optical axis (502),at least one membrane holder (80) for holding the at least one membrane (100), andat least one immersion medium (160) which is at least introduced between the membrane (100) and the object carrier (50),wherein the membrane (100) and the membrane holder (80) are fastened at a point outside of the objective, and wherein the membrane (100) is arranged at the membrane holder (80) in a manner that first contact points (81) between the membrane (100) and the membrane holder (80) are located on or outside a lateral surface (510) which is formed by a geometric extrusion of the edge (47) of the objective (40) parallel to the optical axis (502).The apparatus (10), the method and the object transport unit (55) facilitate the optical characterization or processing of an object (60) in a manner that meets the specific needs of high-throughput industrial applications.