Semiconductor Memory Barrier Conducting Layers Thermal Management

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Solution Overview

Problem

Current semiconductor memory devices face challenges in achieving low power consumption and stable switching operations due to the limitations in reducing current densities and preventing phase change in non-target regions during write operations, especially with decreasing electrode widths and varying thermal conductivity of barrier conducting layers.

Innovation Solution

The semiconductor memory device employs barrier conducting layers with adjusted coefficients of thermal conductivity and thicknesses to control heat distribution, ensuring efficient Joule heat generation and phase change in the phase change region while minimizing heat escape, thereby allowing write operations at lower currents and maintaining stable switching.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If the current density is reduced to achieve lower power consumption, then power consumption decreases, but the phase change in the phase change region becomes insufficient and switching stability deteriorates

Engineering Contradiction:
Improvepower consumptionVSAvoidswitching stability
Core Design Contradiction:
Use of energy by moving objectVSReliability

Solution Approach 1:

The patent applies local quality by creating distinct thermal environments in different regions: the phase change region has high thermal conductivity barrier layers to concentrate heat, while non-target regions have low thermal conductivity barrier layers to prevent heat escape. This localized thermal management allows reduced current density while maintaining sufficient phase change in the target region.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The barrier conducting layers act as thermal intermediaries that mediate heat distribution. By adjusting their thermal conductivity, they control heat flow to ensure sufficient temperature rise in the phase change region even at lower current densities, while preventing excessive heat diffusion to non-target regions.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Area of moving object

If the electrode width is decreased to increase integration density, then device integration improves, but the Joule heat generation becomes insufficient for reliable phase change

Engineering Contradiction:
Improveelectrode widthVSAvoidJoule heat generation
Core Design Contradiction:
Area of moving objectVSPower

Solution Approach 1:

The patent implements local quality by positioning high thermal conductivity barrier layers specifically at the phase change region boundaries. This concentrates the limited Joule heat generated by narrow electrodes into the target phase change region, ensuring sufficient temperature rise despite reduced electrode width and power.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the thermal conductivity parameter of barrier layers spatially - high thermal conductivity at phase change region boundaries to concentrate heat, and low thermal conductivity at non-target region boundaries to prevent heat loss. This parameter optimization enables narrow electrodes to achieve reliable phase change.

Inventive Principle:
Principle #35Parameter changes

3Power

If the thermal conductivity of barrier conducting layers is increased to improve heat confinement, then phase change efficiency in target region improves, but heat escape to non-target regions increases causing unwanted phase change

Engineering Contradiction:
Improvephase change efficiencyVSAvoidunwanted phase change in non-target regions
Core Design Contradiction:
PowerVSObject-generated harmful factors

Solution Approach 1:

The patent applies local quality by assigning different thermal conductivity values to barrier layers in different locations: high thermal conductivity barrier layers are placed at the phase change region boundaries to confine heat, while low thermal conductivity barrier layers are placed at non-target region boundaries to block heat diffusion. This spatial differentiation resolves the contradiction between heat confinement and preventing unwanted phase change.

Inventive Principle:
Principle #3Local quality

4Loss of energy

If the thickness of barrier conducting layers is increased to reduce heat escape, then heat confinement improves, but the manufacturing complexity and device structure become more complex

Engineering Contradiction:
Improveheat escapeVSAvoiddevice structure
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent optimizes the thickness parameter of barrier conducting layers to achieve the desired thermal isolation effect with minimal added structure. By carefully selecting thickness values, the patent reduces heat escape without significantly increasing device complexity or manufacturing difficulty.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables lower power consumption and stable switching operations by efficiently managing heat and current densities, reducing phase change in non-target areas, and allowing for smaller electrode widths without compromising performance.

Implementation Method 1

efficient Joule heat generation and phase change in the phase change region

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

barrier conducting layers with adjusted coefficients of thermal conductivity to control heat distribution

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

first phase change layers disposed between the first wirings and the third wirings, and second phase change layers disposed between the third wirings and the second wirings

Methodology Applied
Scientific EffectPhase change: Phase Change

Data Source

PatentUS11508906B2Semiconductor memory device
Publication Date: 2022.11.22 KIOXIA CORP
  • US11508906B2 patent drawing
  • US11508906B2 patent drawing
  • US11508906B2 patent drawing

AI summary

According to one embodiment, a semiconductor memory device includes: a first and a second wirings; a third wiring disposed between them; a first phase change layer disposed between the first and the third wirings; a first conducting layer disposed on a first wiring side surface of the first phase change layer; a second conducting layer disposed on a third wiring side surface of the first phase change layer; a second phase change layer disposed between the third and the second wirings; a third conducting layer disposed on a third wiring side surface of the second phase change layer; and a fourth conducting layer disposed on a second wiring side surface of the second phase change layer. The first and the fourth conducting layers have coefficients of thermal conductivity larger or smaller than the coefficients of thermal conductivity of the second and the third conducting layers.