Memory Device With Silicon Nanocrystal Tunnel Junctions

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Solution Overview

Problem

Conventional memory elements with two terminals face challenges in achieving reversible resistance changes, rectification, and efficient voltage and current control for writing, erasing, and reading operations due to limitations in the variable resistance portion and tunnel junction structures.

Innovation Solution

A memory device is designed with a conductive-bridge element and multiple tunnel junctions, featuring silicon nanocrystal layers and tunnel insulating films, which allows for reversible resistance changes and improved rectification by controlling energy barriers and grain sizes of silicon nanocrystals, enabling efficient writing, erasing, and reading operations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional variable resistance portion is used in a two-terminal memory element, then the memory can perform writing and erasing operations, but it cannot provide sufficient rectification function and voltage/current control in forward and reverse bias directions

Engineering Contradiction:
Improverectification functionVSAvoidtunnel junction structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The tunnel junction is segmented into multiple distinct layers including a first tunnel insulating film, first nanocrystal layer, second tunnel insulating film, and second nanocrystal layer. This segmentation allows each layer to perform specific functions: the tunnel insulating films provide barrier structures for rectification, while the nanocrystal layers provide charge trapping and Coulomb blockade effects, collectively achieving both rectification and voltage control without requiring a completely separate control electrode.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The tunnel junction employs a composite structure combining different materials with complementary properties: tunnel insulating materials (such as SiO2 or Si3N4) provide high breakdown voltage and rectification, while nanocrystal materials (such as silicon nanocrystals) provide quantum confinement effects and charge storage. This composite approach enables the single memory element to simultaneously achieve rectification, voltage control, and resistance switching functions.

Inventive Principle:
Principle #40Composite materials

2Ease of operation

If the variable resistance portion changes resistance for data storage, then memory function is achieved, but voltage and current control in each operating state becomes difficult

Engineering Contradiction:
Improvevoltage and current controlVSAvoidmultiple tunnel junctions
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The multi-layer tunnel junction structure is designed to perform multiple functions within a single component: it provides rectification (allowing current flow in one direction while blocking in the reverse direction), voltage control through the Coulomb blockade effect in nanocrystals, and current regulation. This multi-functionality eliminates the need for separate control electrodes or additional circuitry, simplifying the overall device operation while maintaining precise voltage and current control.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The nanocrystal layers are designed with specific grain sizes and density parameters that can be controlled during fabrication. By adjusting the nanocrystal size (affecting quantum confinement energy) and density (affecting charge trapping capacity), the voltage and current characteristics of the tunnel junction can be tuned to achieve optimal control for different operating states without changing the basic device structure.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If a simple two-terminal structure is used, then device complexity is reduced, but rectification function and voltage control capability are insufficient

Engineering Contradiction:
Improvetwo-terminal structureVSAvoidrectification and voltage control
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The tunnel junction employs asymmetric layering with different tunnel insulating films and nanocrystal layers positioned at different locations between the two terminals. This asymmetric structure creates inherent rectification behavior where the energy barriers for electron transport differ in forward and reverse directions, enabling the two-terminal device to achieve diode-like rectification without requiring an external control electrode.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The nanocrystal layers act as intermediary charge trapping sites between the two terminals, mediating the electron transport process. These nanocrystals can capture and hold charges, creating Coulomb blockade effects that control current flow and provide voltage regulation. This intermediary mechanism enables the two-terminal structure to achieve complex voltage and current control functions that would otherwise require additional control elements.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The memory device achieves stable rectification and efficient control of currents and voltages in each operating state, ensuring reliable storage and operation by utilizing the Coulomb blockade and quantum confinement effects in the silicon nanocrystal layers.

Implementation Method 1

The memory device achieves stable rectification and efficient control of currents and voltages in each operating state, ensuring reliable storage and operation by utilizing the Coulomb blockade and quantum confinement effects in the silicon nanocrystal layers.

Methodology Applied
Scientific EffectCoulomb blockade: Coulomb Damping

Implementation Method 2

The memory device achieves stable rectification and efficient control of currents and voltages in each operating state, ensuring reliable storage and operation by utilizing the Coulomb blockade and quantum confinement effects in the silicon nanocrystal layers.

Methodology Applied
Scientific EffectQuantum confinement:

Data Source

PatentUS8969843B2Memory device
Publication Date: 2015.03.03 KIOXIA CORP
  • US8969843B2 patent drawing
  • US8969843B2 patent drawing
  • US8969843B2 patent drawing

AI summary

According to one embodiment, a memory device includes first and second conductive layers, a variable resistance portion, and a multiple tunnel junction portion. The variable resistance portion is provided between the first and second conductive layers. The multiple tunnel junction portion is provided between the first conductive layer and the variable resistance portion, and includes first, second, and third tunnel insulating films, and first and second nanocrystal layers. The first nanocrystal layer between the first and second tunnel insulating films includes first conductive minute particles. The second nanocrystal layer between the second and third tunnel insulating films includes second conductive minute particles.