Semiconductor Memory Structure With Resistance Patterns for Spike Control

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Solution Overview

Problem

The challenge of improving the degree of integration and operational reliability of semiconductor devices is limited by the area occupied by unit memory cells, particularly in three-dimensional stacking structures.

Innovation Solution

A semiconductor device is designed with a specific structure that includes first and second column lines, memory cells connected between these lines, and resistance patterns to reduce damage from spike currents, utilizing materials with higher resistivity to enhance stability and integration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If three-dimensional stacking structures are used to improve degree of integration, then integration is improved, but operational reliability deteriorates due to spike current damage

Engineering Contradiction:
Improvedegree of integrationVSAvoidoperational reliability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

A resistance pattern is introduced as an intermediary component between the first column line and the second column line. This resistance pattern acts as a mediator that limits spike current flow while maintaining signal transmission, thereby protecting memory cells from current-induced damage in three-dimensional stacked structures

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The resistance pattern changes the electrical parameter (resistance) at the interface between column lines. By introducing a controlled resistance element, the patent modifies current flow characteristics to prevent excessive spike currents from reaching memory cells, thus improving reliability while preserving integration benefits

Inventive Principle:
Principle #35Parameter changes

2Productivity

If three-dimensional stacking structures are used to improve degree of integration, then integration is improved, but contact resistance increases

Engineering Contradiction:
Improvedegree of integrationVSAvoidcontact resistance
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The resistance pattern serves as an intermediary that manages contact resistance between stacked column lines. Rather than eliminating contact resistance, it controls and optimizes it to prevent spike currents while maintaining necessary electrical connectivity in three-dimensional structures

Inventive Principle:
Principle #24Intermediary (Mediator)

3Productivity

If memory cells are stacked in three dimensions to improve integration, then degree of integration is improved, but damage from spike currents increases

Engineering Contradiction:
Improvedegree of integrationVSAvoidspike current damage
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The resistance pattern is positioned between column lines to act as a protective intermediary. It absorbs and limits spike current energy before it can reach and damage memory cells, effectively reducing harmful current effects while enabling three-dimensional stacking for improved integration

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The resistance pattern provides beforehand cushioning by pre-positioning a current-limiting element between column lines. This protective measure is built into the structure before spike currents can cause damage, cushioning against harmful current effects in advance

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed structure increases integration and reduces damage to memory cells by minimizing contact resistance and spike current effects, thereby enhancing the reliability and performance of the semiconductor device.

Implementation Method 1

a first resistance pattern located between the first column line and the second column line

Methodology Applied
Scientific EffectElectrical Resistance: Electrical Resistance

Data Source

PatentUS20250285656A1Semiconductor device and method of manufacturing semiconductor device
Publication Date: 2025.09.11 SK HYNIX INC
  • US20250285656A1 patent drawing
  • US20250285656A1 patent drawing
  • US20250285656A1 patent drawing

AI summary

A semiconductor device includes: a first row line extending in a first direction; a first column line extending in a second direction that intersects the first direction; a first memory cell connected between the first row line and the first column line; a second column line located above the first column line and extending in the second direction; and a first resistance pattern located between the first column line and the second column line.