Memory Substrate Wiring Layout to Suppress Warpage

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Solution Overview

Problem

In semiconductor memory systems, the warpage of thinned rectangle-shaped substrates is a challenge due to thermal expansion coefficient differences between layers, leading to convex shape deformations, which complicates miniaturization and increases manufacturing costs.

Innovation Solution

The semiconductor memory system employs a multilayer substrate with adjusted wiring densities, particularly in the eighth layer, to equalize thermal expansion coefficients across layers, and uses an adhesive portion to counteract warpage forces, while also incorporating a meshed wiring pattern and slits in the seventh layer to reduce noise interference and simplify wiring design.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the substrate is thinned to meet miniaturization requests, then the size and weight are reduced, but substrate warpage increases due to thermal expansion coefficient differences between layers

Engineering Contradiction:
Improvesubstrate thicknessVSAvoidsubstrate warpage
Core Design Contradiction:
Volume of moving objectVSStability of the object's composition

Solution Approach 1:

The patent adjusts the wiring density parameter in the eighth layer of the substrate to equalize thermal expansion coefficients across different layers. By changing the density parameter of the wiring pattern, the thermal expansion characteristics are modified to reduce warpage in thinned substrates

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies different wiring densities to different layers of the substrate, with specific adjustment in the eighth layer. This local differentiation of wiring density creates varying thermal expansion characteristics in different regions/layers to counteract warpage forces

Inventive Principle:
Principle #3Local quality

2Reliability

If wiring density is increased to improve signal transmission, then signal integrity improves, but thermal expansion coefficient differences increase causing more warpage

Engineering Contradiction:
Improvesignal integrityVSAvoidsubstrate warpage
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The patent optimizes the wiring density parameter to achieve a balance between signal integrity and thermal expansion control. By carefully adjusting this parameter in the eighth layer, both signal transmission quality and warpage suppression are improved simultaneously

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite structure with multiple wiring layers having different densities. This composite wiring architecture allows different layers to serve different functions: some layers optimized for signal transmission, others for thermal expansion management

Inventive Principle:
Principle #40Composite materials

3Object-affected harmful factors

If a meshed wiring pattern with slits is introduced to reduce noise and simplify design, then noise interference decreases, but manufacturing complexity increases

Engineering Contradiction:
Improvenoise interferenceVSAvoidmanufacturing complexity
Core Design Contradiction:
Object-affected harmful factorsVSEase of manufacture

Solution Approach 1:

The patent divides the wiring pattern into segmented structures with slits and meshed regions. This segmentation breaks up continuous wiring into discrete sections, which reduces noise interference while the regular pattern provides manufacturing advantages

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively suppresses substrate warpage, maintains signal integrity, and reduces manufacturing costs by equalizing thermal expansion coefficients and optimizing wiring density, thereby enhancing the stability and efficiency of the semiconductor memory system.

Implementation Method 1

uses an adhesive portion to counteract warpage forces

Methodology Applied
Scientific EffectAdhesion: Adhesive

Implementation Method 2

adjusted wiring densities, particularly in the eighth layer, to equalize thermal expansion coefficients across layers

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS12094866B2Semiconductor memory system
Publication Date: 2024.09.17 KIOXIA CORP
  • US12094866B2 patent drawing
  • US12094866B2 patent drawing
  • US12094866B2 patent drawing

AI summary

According to one embodiment, a semiconductor memory system includes a substrate, a plurality of elements and an adhesive portion. The substrate has a multilayer structure in which wiring patterns are formed, and has a substantially rectangle shape in a planar view. The elements are provided and arranged along the long-side direction of a surface layer side of the substrate. The adhesive portion is filled in a gap between the elements and in a gap between the elements and the substrate, where surfaces of the elements are exposed.