MEMS Membrane Bridge Structure for Curl-Resistant Switching
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Solution Overview
Problem
The existing MEMS switch devices suffer from membrane bridge curling under stress, leading to reduced distance between the membrane bridge and capacitive electrode, adhesion issues, and decreased product yield.
Innovation Solution
Incorporating protruding structures on the membrane bridge body structure perpendicular to the base substrate to adjust stress distribution, reducing curling and maintaining the desired distance between the membrane bridge and capacitive electrode.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional membrane bridge structure is used, then the device structure is simple, but the membrane bridge curls under stress causing adhesion and reduced product yield
Solution Approach 1:
The patent applies local quality by introducing protruding structures at specific locations on the membrane bridge body. These protruding structures are positioned between the membrane bridge body and the capacitive electrode, creating localized stress distribution changes that prevent curling without requiring complete structural redesign. This targeted approach improves reliability while minimizing added complexity.
Solution Approach 2:
The patent introduces protruding structures that extend in a direction perpendicular to the base substrate, adding a vertical dimension to the otherwise planar membrane bridge structure. This dimensional change allows the protruding structures to effectively intervene between the membrane bridge body and capacitive electrode, preventing adhesion caused by curling while maintaining overall structural simplicity.
2Manufacturing precision
If the membrane bridge structure is simplified, then the manufacturing process is easier, but the distance between membrane bridge and capacitive electrode cannot be maintained under stress
Solution Approach 1:
The protruding structures are implemented with specific dimensional parameters (height, width, spacing) that are optimized to maintain the distance between the membrane bridge and capacitive electrode. By concentrating the precision requirements on these localized protruding features rather than the entire membrane bridge structure, the patent achieves manufacturing precision while preserving ease of manufacture for the overall device.
Solution Approach 2:
The protruding structures are pre-formed as integral parts of the membrane bridge body during the manufacturing process. This preliminary action ensures that the distance-maintaining features are already in place before the device is assembled and operated, eliminating the need for post-manufacturing adjustments and simplifying the overall manufacturing process.
3Reliability
If protruding structures are added to reduce curling, then the initial capacitance is maintained, but the device structure becomes more complex
Solution Approach 1:
The protruding structures are strategically positioned in the region between the membrane bridge body and the capacitive electrode, where they most effectively prevent curling-induced adhesion. This localized intervention maintains initial capacitance stability without requiring complex modifications throughout the entire device structure.
Solution Approach 2:
By adding vertical protrusions perpendicular to the base substrate, the patent maintains the horizontal footprint and overall device dimensions while introducing a third dimension that provides the necessary curling prevention. This approach maintains capacitance stability without increasing the device's planar complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves the curling effect, maintains the initial capacitance, and enhances the product yield of the MEMS switch device by effectively reducing the driving voltage required for operation.
Implementation Method 1
the protruding structure can effectively adjust stress distribution on a surface of the membrane bridge structure
Implementation Method 2
maintains the desired distance between the membrane bridge and capacitive electrode... maintains the initial capacitance
Data Source
AI summary
The present disclosure provides an MEMS switch device and an electronic apparatus. The MEMS switch device includes a base substrate, a membrane bridge structure, and a first ground line, a signal line and a second ground line sequentially arranged on a first side surface of the base substrate at intervals; the membrane bridge structure has a first end electrically connected to the first ground line, and a second end, opposite to the first end, electrically connected to the second ground line; and the membrane bridge structure includes a membrane bridge body structure and at least one protruding structure on the membrane bridge body structure, where the protruding structure protrudes from the membrane bridge body structure in a direction perpendicular to the first side surface of the base substrate.