MEMS Driving Device Vibration Feed-Forward Control
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Solution Overview
Problem
Existing MEMS driving devices face challenges in maintaining precise control of gap dimensions between substrates due to external disturbance vibrations, leading to prolonged convergence times and potential divergence.
Innovation Solution
Incorporating a vibration detection unit that applies a feed-forward voltage to the electrostatic actuator to suppress disturbance vibrations, combined with a bias and control actuator configuration for precise gap control, allowing for rapid convergence of the gap dimension to a desired value.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If feedback control is performed on the electrostatic actuator, then the gap dimension between substrates can be controlled, but when disturbance vibration is added, the control performance deteriorates and substrates diverge and vibrate
Solution Approach 1:
The vibration detection unit detects disturbance vibration and the actuator control unit applies feed-forward voltage to the electrostatic actuator before the vibration affects the gap dimension control. This preliminary action suppresses the disturbance vibration's impact on substrate positioning, preventing divergence and maintaining control stability under vibration conditions
2Device complexity
If only feedback control is used to control gap dimension, then the system is simple, but it cannot sufficiently cope with high frequency vibration disturbances
Solution Approach 1:
A vibration detection unit detects disturbance vibration and the actuator control unit applies feed-forward voltage to suppress vibration effects before they significantly impact the gap dimension. This preliminary vibration suppression action enhances reliability without substantially increasing system complexity
Solution Approach 2:
The system incorporates feedback control where the actuator control unit receives detection results from the vibration detection unit and adjusts the electrostatic actuator accordingly. This closed-loop feedback mechanism enables the system to adapt to vibration disturbances while maintaining manageable complexity
3Measurement precision
If feed-forward voltage is applied to suppress vibration, then gap dimension control precision is improved, but additional control mechanisms are required
Solution Approach 1:
The vibration detection unit detects disturbance vibration and the actuator control unit applies feed-forward voltage to the electrostatic actuator to suppress vibration effects before they impact gap dimension control. This approach improves precision while adding only essential detection and control components
Solution Approach 2:
The actuator control unit performs multiple functions: it processes feedback control signals for gap dimension control and simultaneously applies feed-forward voltage for vibration suppression. This multi-functionality improves precision without proportionally increasing overall system complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables high-precision driving control and rapid stabilization of the gap dimension between substrates, even under external vibration conditions, enhancing the performance and efficiency of MEMS devices like wavelength variable interference filters.
Implementation Method 1
an electrostatic actuator which changes a gap dimension between the pair of substrates
Implementation Method 2
a vibration detection unit that detects vibration which is added to the MEMS element
Implementation Method 3
an actuator control unit that applies a feed-forward voltage based on a detected value of the vibration detection unit to the electrostatic actuator
Data Source
AI summary
A spectroscopic measurement apparatus includes a fixed substrate, a movable substrate, and a wavelength variable interference filter which includes an electrostatic actuator for changing the gap dimension between the substrates, a vibration disturbance detection unit which detects vibration added to the wavelength variable interference filter, and a bias driving unit which applies a feed-forward voltage based on a detected value of the vibration disturbance detection unit to the electrostatic actuator.