MEMS Image Stabilization Platform with In-Plane Actuation
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Solution Overview
Problem
Current image sensor stabilization techniques face limitations in movement range and energy consumption, particularly in microelectromechanical actuators that operate mainly out of plane.
Innovation Solution
A microelectromechanical device with actuators arranged on a substrate, coupled to a platform via motion conversion elastic elements, allowing in-plane movements to be converted into transverse movements, enabling roll, pitch, and out-of-plane translations for image stabilization, using electrostatic actuators.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If out-of-plane actuators are used for image sensor stabilization, then the stabilization function is achieved, but the movement range is limited and energy consumption increases
Solution Approach 1:
The patent transitions from out-of-plane actuation to in-plane actuation by arranging actuators on the substrate plane with their actuation axes parallel to the substrate. The motion conversion elastic elements transform these in-plane actuator movements into transverse (out-of-plane) platform movements, effectively changing the dimension of actuation while achieving the same stabilization function with lower energy consumption and increased movement range
2Reliability
If out-of-plane actuators are used for image sensor stabilization, then the stabilization function is achieved, but the movement range is limited
Solution Approach 1:
The patent uses in-plane actuators that can move freely within the substrate plane, providing greater movement range in the actuation direction. The motion conversion elastic elements then transform these extended in-plane movements into transverse platform movements, achieving larger overall movement range compared to direct out-of-plane actuators
3Use of energy by moving object
If in-plane actuators with motion conversion elements are used, then movement range increases and energy consumption reduces, but device complexity increases
Solution Approach 1:
The patent employs motion conversion elastic elements made as thin flexible membranes or films that couple the in-plane actuators to the platform. These elastic elements provide the necessary motion transformation through their flexible deformation, achieving the function with minimal structural complexity and maintaining device compactness
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances image stabilization performance by increasing movement range and reducing energy consumption while maintaining compact dimensions, and allows for focus functions in optical systems.
Implementation Method 1
Each motion conversion elastic element converts movements of its associated actuator along its respective actuation axis into movements of the corresponding coupling portion of the platform along directions transverse to the substrate
Implementation Method 2
using electrostatic actuators
Data Source
AI summary
A microelectromechanical device includes a substrate, a platform suspended and movable with respect to the substrate, and actuators. The actuators are arranged on the substrate around the platform, coupled to respective coupling portions of the platform and having respective actuation axes parallel to the substrate and perpendicular to each other. The microelectromechanical device further includes connection structures, each coupling a respective actuator with the platform and comprising a motion conversion elastic element interposed between the respective actuator and the platform. Each motion conversion elastic element is configured to convert movements of the actuators along its corresponding actuation axes into movements of the coupling portions of the platform along directions transverse to the substrate.