MEMS Gyroscope Insulating Layer for Voltage Control
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Solution Overview
Problem
Traditional MEMS gyroscopes face challenges in achieving high sensitivity and low manufacturing cost due to the limitation of shared electrical paths for the frame and proof mass, which restricts the ability to apply different voltages for optimal performance.
Innovation Solution
The implementation of an electrical insulating structure within MEMS devices, utilizing an insulating layer to divide conductive portions in the moving parts, anchors, and springs, allowing for independent electrical paths for the frame and proof mass, enabling separate voltage applications.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the frame and proof mass use the same electrical path, then the device complexity is reduced, but the ability to apply different voltages for optimal performance is lost
Solution Approach 1:
The electrical path is segmented into separate independent paths for the frame and proof mass by introducing an insulating layer. This segmentation allows different voltages to be applied to each component independently, resolving the contradiction between voltage control flexibility and device complexity.
Solution Approach 2:
An insulating layer is introduced as an intermediary element between the frame and proof mass electrical paths. This intermediary prevents electrical connection between the two paths, enabling independent voltage control while maintaining a relatively simple overall device structure.
2Power
If higher voltage is applied to the frame, then the driving effectiveness is improved, but the sensitivity of the gyroscope decreases due to voltage sharing
Solution Approach 1:
The electrical path is segmented into separate independent paths for the frame and proof mass by introducing an insulating layer. This segmentation allows different voltages to be applied to each component independently, resolving the contradiction between voltage control flexibility and device complexity.
Solution Approach 2:
Different voltage levels are applied to different parts of the device: higher voltage to the frame for effective driving, and lower voltage to the proof mass for high sensitivity. This local quality approach optimizes both power and measurement precision simultaneously.
3Ease of manufacture
If the same voltage is applied to both frame and proof mass, then the electrical path structure is simplified, but the manufacturing cost increases due to compromised performance optimization
Solution Approach 1:
The electrical path is segmented into separate independent paths for the frame and proof mass by introducing an insulating layer. This segmentation allows different voltages to be applied to each component independently, resolving the contradiction between voltage control flexibility and device complexity.
Solution Approach 2:
The voltage parameter is changed independently for different components: higher voltage for the frame and lower voltage for the proof mass. This parameter change enables performance optimization without significantly complicating the manufacturing process, as the insulating layer can be integrated into existing fabrication steps.
Data Source
AI summary
The disclosure relates to a micro-electromechanical system (MEMS) device having an electrical insulating structure. The MEMS device includes at least one moving part, at least one anchor, at least one spring and an insulating layer. The spring is connected to the anchor and to the moving part. The insulating layer is disposed in the moving part and the anchor. Each of the moving part and the anchor is divided into two conductive portions by the insulating layer. Whereby, the electrical signals of different moving parts are transmitted through the insulated electrical paths which are not electrically connected.