MEMS Ion Beam Generator Voltage Gradient Extraction

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Solution Overview

Problem

Current mass spectrometers are not optimized for ion extraction, leading to inefficiencies in ion beam generation and analysis, particularly in compact and portable devices.

Innovation Solution

An ion beam generator with a chamber for fluid ionization, utilizing a voltage gradient created by multiple electrodes to direct ions generated in the ionization chamber directly to an outlet zone, improving ion extraction efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional ion extraction methods are used in mass spectrometers, then the device structure is simpler, but ion extraction efficiency and recovery rate are poor

Engineering Contradiction:
Improveion extraction efficiencyVSAvoidextractor structure complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The extractor is divided into multiple independently controllable electrodes (first extractor electrode, second extractor electrode, third extractor electrode) with distinct functions. The first electrode generates primary extraction field, the second electrode refines ion direction, and the third electrode provides final focusing. This segmentation allows optimized ion extraction efficiency while maintaining manageable structural complexity through modular design.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The voltage gradient is established in advance within the ionization chamber before ions are fully formed and directed toward the outlet. By pre-configuring the electric field distribution through multiple electrodes at specific potentials, ions are immediately guided along optimal trajectories from generation to extraction, maximizing recovery rate before ions can disperse randomly.

Inventive Principle:
Principle #10Preliminary action

2Productivity

If ions are directed randomly according to impact of ionising particles, then the ionization process is simpler, but ion recovery rate at outlet is low

Engineering Contradiction:
Improveion recovery rateVSAvoidvoltage gradient configuration
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

Different regions of the ionization chamber are assigned different electric field strengths and directions through the multiple electrodes. The first electrode creates a strong field near the impact zone for immediate ion capture, the second electrode provides intermediate field for directional guidance, and the third electrode creates a focusing field near the outlet. This local differentiation of field properties ensures high ion recovery by guiding ions through optimized paths at each stage of their journey.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The second extractor electrode acts as an intermediary element between the primary extraction field (first electrode) and the final focusing field (third electrode). It provides intermediate guidance for ions, smoothing the transition and ensuring continuous optimal directioning through the chamber, which maximizes ion recovery rate by preventing ion loss during the transition phases.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances ion recovery rates by aligning the ion exit direction with the ionization phase, resulting in improved ion extraction and analysis efficiency.

Implementation Method 1

a source of ionising particles configured to impact the fluid in an impact zone of the ionisation chamber in such a way as to generate ions

Methodology Applied
Scientific EffectIonisation: Ionisation

Implementation Method 2

at least two electrodes configured to generate a voltage gradient in the impact zone, with the voltage gradient tending to direct the ions generated to the outlet zone of the generator

Methodology Applied
Scientific EffectElectric Field: Electric Field

Data Source

PatentUS10395907B2MEMS device for generating an ion beam
Publication Date: 2019.08.27 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • US10395907B2 patent drawing
  • US10395907B2 patent drawing
  • US10395907B2 patent drawing

AI summary

A generator of an ion beam is provided, including an ionization chamber provided with an inlet of a fluid to be ionized; a source of ionizing particles configured to impact the fluid in an impact zone of the ionization chamber so as to generate ions; and an extractor of ions generated in a direction of an outlet zone of the generator, the extractor including at least two electrodes, a first electrode referred to as input electrode laterally bordering the impact zone, and at least one second electrode referred to as intermediate electrode located in the impact zone, the at least two electrodes being configured to generate a voltage gradient in the impact zone, with the voltage gradient being configured to direct the generated ions to the outlet zone of the generator.