MEMS Micro-Mirror Sandwich Structure for High-Frequency Operation
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Solution Overview
Problem
Resonating MEMS micro-mirrors face challenges in achieving high frequencies greater than 10 kHz and maximum tilt amplitudes greater than 10° due to mass-related inertia issues, which lead to dynamic deformation and compromised optical resolution.
Innovation Solution
A MEMS micro-mirror with a sandwich structure comprising two face plates and a hollow core assembly, where the hollow core assembly reduces mass and increases stiffness, allowing for high-frequency operation with reduced dynamic deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the mirror body mass is reduced to increase resonant frequency, then the resonant frequency can be increased, but the structural stiffness decreases leading to dynamic deformation
Solution Approach 1:
The mirror body uses a composite sandwich structure combining front plate, back plate, and hollow core assembly to achieve high stiffness-to-weight ratio, enabling resonant frequencies greater than 10 kHz while maintaining structural integrity
Solution Approach 2:
The mirror body is divided into multiple segments (front plate, back plate, hollow core assembly) that work together to provide both lightweight construction and high stiffness, preventing dynamic deformation during high-frequency operation
2Speed
If the mirror body mass is reduced to achieve higher resonant frequency, then oscillation speed increases, but dynamic deformation increases compromising optical resolution
Solution Approach 1:
The sandwich structure provides high stiffness that counteracts dynamic deformation during high-speed oscillation, maintaining optical resolution even at resonant frequencies greater than 10 kHz
Solution Approach 2:
The segmented sandwich structure distributes mechanical stresses across multiple components, preventing localized deformation that would compromise optical precision during rapid oscillation
Data Source
AI summary
A microelectromechanical system (MEMS) mirror device includes a frame that defines a frame cavity; a suspension assembly; and a mirror body coupled to the frame by the suspension assembly such that the mirror body is suspended over the frame cavity. The mirror body comprises a sandwich structure that includes a front plate, a back plate, and a hollow core assembly arranged between the front plate and the back plate. The front plate and the back plate define a thickness dimension of the mirror body. The hollow core assembly includes a plurality of support structures that extend between the front plate and the back plate and define a plurality of cavities between the front plate and the back plate.