MEMS Microphone Testing via Temporary Carrier Opening

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Solution Overview

Problem

MEMS microphones with sound entrance openings at unusual locations face complex functional testing, requiring separate electrical and acoustic contacts from different sides, making testing more intricate compared to conventional designs with sound openings at the bottom.

Innovation Solution

A microphone design featuring a transducer element enclosed between a carrier and a cover, with a first sound entrance opening in the carrier for testing and a second opening at an arbitrary location on the cover, allowing for simple and automated testing and flexible placement of the second opening.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the sound entrance opening is arranged at an unusual location to meet acoustic requirements, then acoustic performance is improved, but functional testing becomes significantly more complex

Engineering Contradiction:
Improveacoustic performanceVSAvoidtesting complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by providing a temporary first sound entrance opening in the carrier that enables functional testing before the final cover is attached. This preliminary opening allows acoustic and electrical contacts to be established from the same side during testing, and is subsequently closed off after testing is complete, while the permanent second sound entrance opening is formed in the cover at the desired location for optimal acoustic performance.

Inventive Principle:
Principle #10Preliminary action

2Ease of operation

If the sound entrance opening is arranged at the bottom for simple testing, then testing simplicity is improved, but design freedom for acoustic optimization is reduced

Engineering Contradiction:
Improvetesting simplicityVSAvoiddesign freedom
Core Design Contradiction:
Ease of operationVSAdaptability or versatility

Solution Approach 1:

The patent applies segmentation by separating the testing function from the final acoustic function through two distinct sound entrance openings. The first opening in the carrier serves the testing function, allowing simple automated testing from one side. The second opening in the cover serves the acoustic function, allowing optimization of sound direction and pickup characteristics. This segmentation allows both simple testing and design freedom to coexist.

Inventive Principle:
Principle #1Segmentation

3Reliability

If electrical and acoustic contacts are established from two different sides for unusual sound opening locations, then acoustic performance is improved, but testing automation becomes more difficult

Engineering Contradiction:
Improveacoustic performanceVSAvoidtesting automation
Core Design Contradiction:
ReliabilityVSExtent of automation

Solution Approach 1:

The patent introduces an intermediary element - the temporary first sound entrance opening in the carrier - that mediates between the testing requirements and the final acoustic configuration. This intermediary opening allows both acoustic signals and electrical contacts to be accessed from the same side during automated testing, eliminating the need for complex two-sided contact establishment, while still enabling the final cover to have the optimally positioned second sound entrance opening for acoustic performance.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables straightforward and automated testing while providing design flexibility for the placement of the sound entrance opening, improving testing efficiency and acoustic performance by using a sealing structure for secure mounting and unimpeded sound transmission.

Implementation Method 1

The transducer element can convert acoustic signals that enter through a sound entrance opening into electrical signals

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS8865499B2MEMS microphone and method for producing the MEMS microphone
Publication Date: 2014.10.21 INVENSENSE INC
  • US8865499B2 patent drawing
  • US8865499B2 patent drawing
  • US8865499B2 patent drawing

AI summary

The invention relates to a method for producing a microphone, in which a transducer element (WE) is mounted on a carrier (TR); a cover is arranged over the transducer element (WE) and the carrier (TR) such that the transducer element (WE) is enclosed between the cover and the carrier (TR); a first sound inlet opening (S01) is produced in the carrier (TR); a functional test of the microphone is carried out; the first sound inlet opening (S01) is closed; and a second sound inlet opening (S02) is created in the cover. The present invention further relates to a microphone resulting from the method, in which the first sound inlet opening (S01) is prepared but closed.