MEMS Mirror Drive Device Elastic Coupling Control
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Solution Overview
Problem
Conventional mirror driving apparatuses, such as MEMS scanners, face challenges in efficiently driving a mirror with a new aspect, particularly in terms of rotational direction and resonance frequency, due to limitations in the interaction between magnetic fields and coils.
Innovation Solution
A driving apparatus comprising a first and second base part connected by an elastic part, where the first base part is driven by a driving force applying part, such as a coil and yoke, to transmit motion to the second base part, which supports the driven part, allowing for rotational motion around multiple axes and improved resonance frequency control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a coil and magnet are used to drive a mirror through magnetic field interaction, then rotational motion is achieved, but control precision and adaptability are limited
Solution Approach 1:
The device is divided into two separate base parts (first base part and second base part) connected by an elastic part. The driving force is applied to the first base part, which then transmits motion through the elastic connection to the second base part that supports the driven object. This segmentation allows independent optimization of driving and support functions, improving control precision while managing complexity.
Solution Approach 2:
The elastic part serves as an intermediary element between the first base part (driving side) and the second base part (support side). It transmits driving forces while allowing for elastic deformation, which enables precise control of the driven object's rotational motion and enhances adaptability to different operating conditions.
2Manufacturing precision
If a single base supports the driven part directly, then device complexity is reduced, but control precision and resonance frequency adjustment are limited
Solution Approach 1:
The elastic part introduces dynamic characteristics to the system, allowing the resonance frequency to be adjusted by changing the elastic properties or pre-stress of the elastic connection. This enables precise control of the driven object's resonant behavior without requiring a completely different structural configuration.
Solution Approach 2:
The resonance frequency and mechanical properties of the system can be adjusted by changing parameters of the elastic part, such as its stiffness, length, or pre-tension. This provides a flexible means to optimize manufacturing precision and control characteristics without fundamentally altering the device architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables efficient rotation of the driven part by transmitting driving forces through the elastic connection, allowing for precise control of rotational direction and resonance frequency, thereby enhancing the performance of the MEMS scanner.
Implementation Method 1
an elastic part which connects the first base part and the second base part
Implementation Method 2
a coil and a magnet are used to drive a mirror. In this case, due to an interaction between a magnetic field generated by applying current to the coil and a magnetic field of the magnet, a force in a rotational direction is applied to the mirror
Data Source
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AI summary
A driving apparatus (101) is provided with: a first base part (110); a second base part (120); an elastic part (210) configured to couple the first base part with the second base part; and a driven part (400) supported by the second base part in a drivable aspect. According to such a driving apparatus, for example, if a driving force is applied to the first base part, the driving force is transmitted to the second base part via the elastic part. Thus, the driven part supported by the second base part can be preferably driven.