MEMS Oscillator Amplitude Control Using Synchronous Rectification

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Solution Overview

Problem

Existing oscillator circuits, particularly those using quartz resonators, suffer from poor amplitude regulation accuracy and frequency stability, which is inadequate for high-performance silicon MEMS oscillators, requiring complex compensation and being sensitive to amplitude variations.

Innovation Solution

A high-performance oscillator circuit incorporating a transconductance stage, comparator, synchronous rectifier, switched capacitor notch filter, and control current generator to precisely regulate the frequency of MEMS resonators, eliminating the need for complex amplitude compensation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional amplitude regulator circuitry is used in quartz oscillators, then the circuit can operate with simple amplitude control, but the amplitude regulation accuracy and frequency stability are poor

Engineering Contradiction:
Improveamplitude regulation accuracyVSAvoidcircuit complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces conventional mechanical/amplifier-based amplitude regulation with a digital signal processing approach. A synchronous detector converts the oscillator output to a rectified signal, which is then processed by a low-pass filter to generate a DC control voltage. This voltage controls a variable gain amplifier to regulate amplitude, achieving high precision without complex analog amplitude regulator circuitry.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces a synchronous detector as an intermediary component between the oscillator and the amplitude control mechanism. This detector rectifies the oscillator signal and converts it to a form suitable for control processing, enabling precise amplitude measurement and regulation while simplifying the overall control architecture.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Stability of the object's composition

If complex amplitude compensation is implemented to improve frequency stability, then frequency stability improves, but the device complexity increases

Engineering Contradiction:
Improvefrequency stabilityVSAvoidcompensation circuit complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent implements a closed-loop feedback system where the synchronous detector continuously monitors the oscillator output amplitude, converts it to a DC control signal through rectification and low-pass filtering, and feeds this signal back to control the variable gain amplifier. This automatic feedback mechanism maintains frequency stability by dynamically adjusting gain based on real-time amplitude measurements, eliminating the need for complex manual compensation circuits.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The amplitude control system is self-regulating through the feedback loop. The synchronous detector automatically detects amplitude variations, the low-pass filter generates the appropriate control voltage, and the variable gain amplifier adjusts its gain accordingly without external intervention, achieving stable operation through self-service control.

Inventive Principle:
Principle #25Self-service

3Measurement precision

If simple RC filters are used for amplitude regulation, then the circuit is simple, but the regulation accuracy is insufficient for MEMS oscillators

Engineering Contradiction:
Improveregulation accuracyVSAvoidfilter circuit complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces simple passive RC filters with an active switched-capacitor low-pass filter. This active filter uses operational amplifiers and switches to achieve superior frequency response and filtering performance, enabling precise extraction of the DC control signal from the rectified waveform while rejecting harmonics and noise, thus achieving high regulation accuracy required for MEMS oscillators.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides significantly improved frequency stability and accuracy for MEMS oscillators, reducing amplitude-dependent frequency shifts and simplifying amplitude control, thereby enhancing overall performance.

Implementation Method 1

A synchronous rectifier converts the differential output signal to a current signal in response to the clock signals

Methodology Applied
Scientific EffectSynchronous rectification:

Implementation Method 2

A switched capacitor notch filter filters the current signal in response to the clock signals

Methodology Applied
Scientific EffectSwitched capacitor filtering:

Implementation Method 3

A high-performance oscillator circuit incorporating a transconductance stage, comparator, synchronous rectifier, switched capacitor notch filter, and control current generator to precisely regulate the frequency of MEMS resonators

Methodology Applied
Scientific EffectMEMS resonance: Resonance

Data Source

PatentUS20120206210A1Circuitry and method for precision amplitude control in quartz and MEMS oscillators
Publication Date: 2012.08.16 TEXAS INSTRUMENTS INC
  • US20120206210A1 patent drawing
  • US20120206210A1 patent drawing
  • US20120206210A1 patent drawing

AI summary

An oscillator includes oscillator circuitry (8) including a transconductance stage (2) and a resonator (3). A comparator (10) produces first (CLK) and second (/CLK) clock signals which indicate the timing of positive and negative phases of a differential output signal (VIN+−VIN−) produced by the transconductance circuit in response to the resonator. A synchronous rectifier (14) converts the differential output signal to a current (IRECT) in response to the first and second clock signals. A switched capacitor notch filter (15) filters the current in response to the first and second clock signals. A control current (ICONTROL) which controls the transconductance of the transconductance circuit is generated in response to the notch filter. The resonator may be a MEMS resonator.