MEMS Resonant Structure With Interlaced Teeth for Higher Electrostatic Force
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Solution Overview
Problem
Conventional MEMS resonators suffer from limited initial electrostatic force due to inadequate structural design, affecting their performance in various devices.
Innovation Solution
A resonant structure in micro electro mechanical systems featuring a main body with non-parallel induction side surfaces and interlaced protruding teeth on both the main body and electrode surfaces, which increases traveling length and initial electrostatic force.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If conventional MEMS resonator structure is used, then device simplicity is maintained, but initial electrostatic force is limited
Solution Approach 1:
The induction portion is segmented into multiple protruding teeth structures, dividing the continuous surface into discrete segments. This segmentation increases the effective interaction area with the electrode while maintaining a relatively simple overall structure, thereby enhancing the initial electrostatic force without proportionally increasing device complexity.
Solution Approach 2:
The induction side surface is designed as a non-parallel (inclined or curved) surface rather than a flat plane, introducing geometric dimensionality changes. This dimensional modification increases the effective area for electrostatic interaction and improves force generation while adding only moderate structural complexity.
2Length of moving object
If conventional parallel induction side surface is used, then manufacturing is simple, but traveling length is limited
Solution Approach 1:
The induction side surface is designed with curvature (inclined or curved surfaces) instead of being perfectly flat. This curvature enables the protruding teeth to engage with the electrode over a longer arc length, increasing the traveling length. The curvature can be implemented through standard molding or machining processes, balancing manufacturing complexity with performance improvement.
3Shape
If simple electrode structure is used, then device complexity is low, but displacement is limited under same resonant frequency
Solution Approach 1:
Both the induction portion and the electrode are equipped with segmented protruding teeth structures. This dual-segmentation design creates multiple interaction points that amplify the displacement effect while maintaining resonant frequency. The segmented structure allows for greater controlled movement without requiring complete structural redesign.
Solution Approach 2:
The protruding teeth on the induction portion are merged with the protruding teeth on the electrode to form an interlaced engagement structure. This merging creates a mechanically coupled system that amplifies displacement while sharing the structural complexity between two components rather than requiring a single complex element.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The resonant structure enhances the traveling length and initial electrostatic force, leading to improved performance and larger displacement under the same resonant frequency conditions.
Implementation Method 1
When a separation distance between the at least one first induction side surface and the second induction side surface is changed, a plurality of surfaces of the first protruding teeth and a plurality of surfaces of the second protruding teeth are configured to produce a capacitance change
Implementation Method 2
When the electrodes are applied with a time-varying voltage signal at certain frequency and the resonant structure is subjected to a bias voltage, the MEMS resonator will start to generate a time-varying electrostatic force, vibrating at certain mode with respect to the frequency given on the electrode
Data Source
AI summary
A resonant structure in micro electro mechanical systems includes a main body and at least one electrode. The main body has a major axis. The main body includes an induction portion and a support portion. The induction portion has at least one first induction side surface that is not parallel to the major axis. The main body has a plurality of first protruding teeth on the first induction side surface. The electrode has a second induction side surface that is not parallel to the major axis. The electrode has a plurality of second protruding teeth on the second induction side surface. When a separation distance between the first induction side surface and the second induction side surface is changed, a plurality of surfaces of the first protruding teeth and a plurality of surfaces of the second protruding teeth are configured to produce a capacitance change.