MEMS Resonator Layout for Precise Temperature Sensing
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Solution Overview
Problem
Existing resonance devices face challenges in precise temperature control due to discrepancies between the temperature sensed by the sensor and the actual temperature of the resonator, primarily caused by uneven heat conduction from the heater to the sensor and resonator.
Innovation Solution
The resonance device incorporates a platform with a resonator and a sensor, where a groove is provided between the measurement portion and the heater, and holding arms connect the resonator and sensor to the platform, ensuring congruent shapes and thermal properties between the resonator and sensor, thereby reducing heat conduction disparities and allowing for precise temperature control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the sensor is formed on the substrate and the heater is formed on the substrate, then the device structure is simple, but the heat from the heater is easily conducted to the sensor compared with the resonator, causing temperature sensing discrepancy
Solution Approach 1:
The patent introduces an insulating film as an intermediary layer between the heater and the sensor. This insulating film has lower thermal conductivity than the substrate material, thereby reducing the heat conduction from the heater to the sensor. This allows the sensor to measure the resonator temperature more accurately without requiring a complex three-dimensional structure, thus resolving the contradiction between device simplicity and measurement precision.
2Stability of the object's composition
If the resonator is formed with a predetermined space from the substrate, then the vibrations of the resonator are prevented from being hampered, but the heat conduction path from the heater to the sensor is shorter than to the resonator
Solution Approach 1:
The insulating film serves as a thermal mediator that equalizes the heat conduction paths. By placing this low-conductivity layer between the heater and both the sensor and resonator, the patent ensures that heat reaches both components through comparable thermal pathways, achieving uniform temperature distribution while maintaining the vibration stability provided by the predetermined space.
3Ease of manufacture
If the sensor measures temperature directly on the substrate, then the temperature measurement is easily obtained, but the measured temperature differs from the actual resonator temperature due to uneven heat conduction
Solution Approach 1:
The insulating film acts as a thermal isolation intermediary that allows the sensor to remain in direct contact with the substrate for easy manufacturing, while simultaneously blocking the direct heat path from the heater to the sensor. This enables the sensor to measure the resonator temperature accurately without compromising manufacturing simplicity, as the insulating film can be integrated into the standard substrate fabrication process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables uniform temperature distribution between the resonator and sensor, enhancing the precision of temperature control and maintaining consistent oscillating frequencies, particularly in GPS systems using MEMS technology.
Implementation Method 1
the heat of a heater is easily conducted to the sensor compared with to the resonator
Implementation Method 2
a heater, a temperature sensor, and a control circuit that are integrally formed on a substrate
Implementation Method 3
a sensor including a measurement portion that measures temperature
Data Source
AI summary
A resonance device with improved precision of temperature control. The resonance device includes a platform; a resonator including a vibrator and one or more holding arms that connect the vibrator and the platform to each other such that a first groove is provided around the vibrator. Moreover, the resonance device includes a sensor with a measurement portion that measures temperature and a heater formed on the platform. A second groove is provided between the measurement portion and the heater.