MEMS Ring Coupling Structure for Homogeneous kHz Resonance
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Solution Overview
Problem
Existing microelectromechanical coupling methods for components like oscillation systems or masses in angular rate sensors face challenges in achieving homogeneous behavior and resonance frequencies without increasing installation space or introducing translational modes, especially when using free-floating rings.
Innovation Solution
A microelectromechanical coupling device with a flexible ring structure and multiple spring elements, each with a small width and low spring hardness, connects to a substrate to suppress translational modes while maintaining homogeneous deformability, allowing resonance frequencies in the kHz range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a free-floating non-mounted ring is used to couple microelectromechanical components, then homogeneous behavior in circumferential direction is achieved, but translational modes form as first eigenmodes and manufacturing effort increases greatly
Solution Approach 1:
The ring structure is segmented into multiple discrete mounting points connected to the substrate via spring elements. This segmentation allows the ring to maintain its flexible, homogeneous behavior while being constrained at specific locations to suppress translational modes. The spring elements provide controlled flexibility at each mounting point, balancing the conflicting requirements.
Solution Approach 2:
The spring elements are designed with specific parameters (stiffness, length, cross-section) that can be adjusted to change the overall system behavior. By carefully selecting spring hardness and geometry, the system achieves suppression of translational modes while preserving the desirable homogeneous deformability of the ring structure.
2Area of stationary object
If stiff short connections (spokes) are used to mount the ring, then space is saved, but resonances cannot be achieved in the kHz range and circumferential homogeneity is lost
Solution Approach 1:
The ring structure itself acts as a flexible element capable of deformation in the kHz range. Instead of using stiff spokes that constrain the ring, the ring's own flexibility is exploited, with spring elements providing necessary mounting connections. This allows the structure to maintain both compact dimensions and appropriate resonance characteristics.
3Reliability
If extremely long soft springs are used to mount the ring, then low resonance frequencies are achieved, but the deviations from ideal ring behavior are large and circumferential homogeneity is lost
Solution Approach 1:
The spring elements are distributed around the circumference of the ring at multiple locations. Each spring element provides local mounting functionality, and their collective arrangement ensures uniform constraint distribution. This local quality approach maintains circumferential homogeneity while achieving the desired resonance frequency characteristics.
4Stability of the object's composition
If many springs are distributed around the circumference to achieve homogeneous mounting, then deformability homogeneity is improved, but the springs must be very narrow and soft which increases device complexity
Solution Approach 1:
Multiple spring elements are combined to work together as a distributed mounting system. The collective effect of these springs provides homogeneous constraint around the ring circumference. By merging their functions, the system achieves uniform deformability characteristics without requiring each individual spring to be overly complex or numerous.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves a coupling device that mimics a free-floating ring's behavior without translational modes, ensuring homogeneous deformability and suitable resonance frequencies for angular rate sensors, enhancing precision and reliability.
Implementation Method 1
a flexible ring structure, which forms a circle at rest, which can be deformed substantially parallel to the plane of the circle... a plurality of spring elements which are suitable for connecting the ring structure to a substrate
Implementation Method 2
which can be deformed substantially parallel to the plane of the circle... deflections perpendicular to the substrate are negligible for the operation
Data Source
AI summary
The invention relates to a microelectromechanical coupling device (100) for coupling microelectromechanical components, having a flexible ring structure (110) which forms a circle in an idle state and which can be deformed substantially parallel to the plane of the circle and is suitable for coupling the microelectromechanical components (200); and a plurality of spring elements (120) which are suitable for connecting the ring structure (110) to a substrate. The coupling device (100) has such a large number of a spring elements (120), such a small width in the circumferential direction of the ring structure (110), and such a low spring hardness that the deformability of the ring structure (110) is homogenous in the circumferential direction of the ring structure (110).