MEMS Seismic Sensor Voltage Partitioning for Low-Power Readout
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Solution Overview
Problem
Existing MEMS sensors face challenges in balancing high accuracy, low power consumption, and stability, particularly when using single power supply voltage, which limits their application scope and measurement range.
Innovation Solution
A seismic acquisition system incorporating a MEMS header module, common-mode voltage adjustment module, readout circuit, feedback circuit, and power supply module, utilizing high voltage feedback and low voltage readout circuit technology to adjust common-mode voltage within the input range of the readout circuit, ensuring sensitivity and accuracy while reducing power consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If high power supply voltage is adopted for power supply, then the sensitivity and measurement range of the MEMS sensor are improved, but the power consumption increases
Solution Approach 1:
The patent divides the power supply system into multiple voltage levels: high voltage power supply (first power supply voltage) for the MEMS sensor to ensure sensitivity and measurement range, and low voltage power supply (second power supply voltage) for the readout circuit and feedback circuit to reduce power consumption. This segmentation allows each component to operate at its optimal voltage level.
Solution Approach 2:
Different parts of the system are assigned different voltage qualities: the MEMS sensor operates at high voltage to maintain its sensitivity and measurement capabilities, while the readout and feedback circuits operate at low voltage to minimize power consumption. This local differentiation of voltage quality resolves the contradiction between sensitivity and power consumption.
2Use of energy by moving object
If low power supply voltage is adopted for power supply, then the power consumption is reduced, but the measurement range and accuracy are limited
Solution Approach 1:
The system segments the voltage supply to provide high voltage specifically to the MEMS sensor while keeping the readout and feedback circuits at low voltage. This ensures the measurement range and accuracy are maintained at the sensor level while overall power consumption is reduced by the low-voltage operation of supporting circuits.
Solution Approach 2:
The patent applies different voltage qualities to different functional blocks: high voltage quality is applied locally to the MEMS sensor to preserve measurement range and accuracy, while low voltage quality is applied to the readout and feedback circuits to achieve power savings, thus resolving the contradiction between power consumption and measurement capability.
3Device complexity
If single power supply voltage is adopted, then the circuit complexity is reduced, but the ability to meet both low power consumption and high accuracy requirements is limited
Solution Approach 1:
The patent segments the power supply into multiple voltage levels (high voltage for MEMS sensor, low voltage for readout and feedback circuits) while maintaining a unified power supply architecture. This segmentation enables the system to meet both low power consumption and high accuracy requirements without excessive complexity, as the segmentation is implemented at the voltage regulation level rather than requiring completely separate power supply systems.
Data Source
AI summary
The present disclosure belongs to the field of geological exploration, and particularly relates to a seismic acquisition system and a sensor based on an MEMS sensor with low power consumption, so as to solve the problem that the existing seismic wave acquisition technology cannot balance high accuracy and low power consumption when the MEMS sensor is used. The present disclosure comprises: the MEMS sensor is used for receiving seismic wave signals and outputting MEMS sensor electrical signals; a common-mode voltage adjustment module is used for adjusting the MEMS sensor signals to be within the input range of common-mode voltage of a readout circuit, so as to obtain low voltage MEMS sensor signals. In the present disclosure, high voltage ensures the detection accuracy of the MEMS sensor; and low voltage is supplied to the readout circuit, thereby reducing the power consumption of the overall seismic acquisition system.


