MEMS Vibration Sensor Correction for Electrode Alignment Errors
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Solution Overview
Problem
Existing sensors with MEMS structures face inaccuracies due to manufacturing errors in comb-teeth electrode pairs and parallel plate electrode pairs, leading to unintended vibration components and increased control interference.
Innovation Solution
A sensor with a movable member supported by a deformable spring mechanism, utilizing correction operations to adjust resistance and voltage values to align vibrations accurately along desired directions, and correcting resonance frequencies and conductive portion voltages to minimize errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If manufacturing processes for comb-teeth electrode pairs and parallel plate electrode pairs are used, then sensor structure can be formed, but manufacturing errors cause unintended vibration components and reduced accuracy
Solution Approach 1:
The patent applies preliminary action by performing correction operations before final measurement. The control device calculates correction values based on detected vibration components and applies these corrections to resistance and voltage values, thereby compensating for manufacturing errors before they affect measurement accuracy.
Solution Approach 2:
The patent changes electrical parameters (resistance and voltage values) to compensate for mechanical manufacturing errors. By adjusting these electrical parameters, the system corrects unintended vibration components caused by imperfect electrode alignment, thus improving measurement precision without requiring higher manufacturing precision.
2Measurement precision
If correction operations are performed to adjust resistance and voltage values, then vibration direction alignment is improved, but device complexity increases
Solution Approach 1:
The patent implements feedback by detecting actual vibration components and using this information to calculate correction values. The control device continuously monitors vibration directions and adjusts resistance and voltage values accordingly, creating a closed-loop system that improves alignment accuracy while managing complexity through automated feedback control.
Solution Approach 2:
The system performs self-correction by automatically detecting its own vibration errors and adjusting its electrical parameters without external intervention. The control device uses the sensor's own output signals to calculate correction values and modify resistance/voltage settings, enabling the system to self-optimize its performance.
3Measurement precision
If resonance frequency correction is applied to the second movable member, then measurement accuracy is improved, but processing operation complexity increases
Solution Approach 1:
The patent applies preliminary action by performing resonance frequency correction before final measurement calculations. The control device detects resonance frequency deviations and applies correction values to the second movable member's operation, ensuring that subsequent rotation angle measurements are based on accurately tuned resonance conditions.
Solution Approach 2:
The patent replaces mechanical frequency adjustment mechanisms with electrical control. Instead of physically adjusting the second movable member's structure to match resonance frequencies, the system uses electrical signals and control algorithms to achieve frequency alignment, thereby improving measurement accuracy while avoiding complex mechanical adjustment mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances sensor accuracy by reducing vibration direction deviations and control interference, enabling precise detection of external forces and rotational angular velocities.
Implementation Method 1
a movable member (10) supported by a deformable spring mechanism
Implementation Method 2
a movable member (10) supported by a deformable spring mechanism
Implementation Method 3
The first structure body includes a first movable member configured to vibrate
Implementation Method 4
The vibration of the first movable member includes first and second components
Data Source
Figure 1
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AI summary
According to one embodiment, a sensor includes a fixed member, a movable member, a first counter electrode, a second counter electrode, a first resistance element, a second resistance element, and a control device. The control device includes a controller. The controller performs a first correction operation in a state where the movable member does not receive an external force. In the first correction operation, the controller causes the movable member to generate a first vibration. In the first correction operation, the controller derives a first correction value based on a first detection result of a first component and a second detection result of a second component. The first correction value includes at least one of a first resistance correction value, a second resistance correction value, a first voltage correction value, or a second voltage correction value such that the movable member vibrates along the first direction.