MEMS Sensor Movable Conductive Part Segmentation
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Solution Overview
Problem
Current sensors utilizing MEMS structures face challenges in enhancing detection accuracy, particularly in efficiently detecting changes in electrical capacitance and resonant frequencies due to limitations in surface area overlap and resonant frequency manipulation.
Innovation Solution
The sensor design incorporates a movable conductive part with a larger length than the connection region, allowing for increased surface area overlap with counter conductive parts, and includes multiple counter conductive parts and beams to efficiently vibrate and detect changes in resonant frequencies, thereby improving detection accuracy and sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the movable conductive part is made longer to increase surface area overlap, then detection sensitivity is improved, but device complexity increases
Solution Approach 1:
The movable conductive part is divided into multiple segments (first movable conductive part, second movable conductive part, etc.) that can move independently or in coordination. This segmentation allows each segment to contribute to the overall detection capability while maintaining manageable structural complexity. The segmented design enables increased effective surface area overlap without requiring a single excessively long conductive part.
Solution Approach 2:
The patent extends the conductive parts in the depth direction (Z-axis) in addition to the surface plane, creating a three-dimensional overlapping structure. This dimensional extension increases the effective surface area overlap and detection sensitivity without requiring excessive length in the two-dimensional plane, thus avoiding excessive structural complexity.
2Measurement precision
If multiple counter conductive parts are added to increase detection sensitivity, then measurement precision is improved, but device complexity increases
Solution Approach 1:
Each counter conductive part is designed to serve multiple functions: detecting capacitance changes, detecting resonant frequency shifts, and providing structural support. This multi-functionality allows the system to achieve high detection sensitivity with fewer components than would be needed if each function required separate elements.
Solution Approach 2:
The patent combines the detection of capacitance changes and resonant frequency changes into a unified sensor structure where movable and counter conductive parts work together. This merging of detection functions into a single integrated system reduces overall device complexity compared to having separate detection mechanisms.
3Measurement precision
If the connection region is made shorter to allow larger movable conductive part, then detection accuracy is improved, but manufacturing precision requirements increase
Solution Approach 1:
The connection region is designed with non-uniform properties - it has reduced length in the direction affecting detection accuracy while maintaining sufficient strength and electrical connection. This localized optimization allows the movable conductive part to be longer for better detection without compromising structural integrity, and the connection region's specific design reduces alignment precision requirements compared to a uniform structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances detection accuracy and sensitivity by increasing the surface area overlap and efficiently manipulating resonant frequencies, enabling high-accuracy detection of accelerations and angles, even in low-pressure environments.
Implementation Method 1
the controller is configured to detect a change of a resonant frequency of the movable beam by detecting a signal between the counter conductive part and the movable conductive part
Implementation Method 2
detecting a signal between the counter conductive part and the movable conductive part
Data Source
AI summary
According to one embodiment, a sensor includes a base body, a first supporter fixed to the base body, and a first movable part separated from the base body. The first movable part includes a first movable base part supported by the first supporter, a second movable base part connected with the first movable base part, and a first movable beam. The first movable beam includes a first beam, a first movable conductive part, and a first connection region. The first beam includes a first beam portion, a second beam portion, and a third beam portion between the first beam portion and the second beam portion. The first beam portion is connected with the first movable base part. The second beam portion is connected with the second movable base part. The first connection region connects the third beam portion and the first movable conductive part.