MEMS Switch Current Sensing for Integrated Overcurrent Protection
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Solution Overview
Problem
Existing MEMS switch devices lack integrated current sensing and overcurrent protection capabilities, requiring external components that increase cost and reduce reliability.
Innovation Solution
Integrate inductive coils within the MEMS switch device to remotely sense current and provide overcurrent protection, using semiconductor manufacturing techniques to form a single microelectronic package with current sensing and overcurrent protection systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If external components are used for current sensing and overcurrent protection, then device functionality is achieved, but device complexity and cost increase
Solution Approach 1:
The patent integrates current sensing and overcurrent protection functions directly into the MEMS switch device by incorporating a shunt and inductive coil within the same package. This merging of functions eliminates the need for separate external components, thereby reducing device complexity while maintaining reliability through integrated overcurrent protection capability.
2Reliability
If external components are used for current sensing and overcurrent protection, then device functionality is achieved, but manufacturing cost increases
Solution Approach 1:
The patent combines current sensing and overcurrent protection functions into the MEMS switch device package, utilizing the shunt and inductive coil that are already part of the device structure. This integration eliminates the need for additional external components, thereby reducing manufacturing cost while maintaining overcurrent protection capability.
3Measurement precision
If inductive coils are integrated within the MEMS switch device, then current sensing accuracy and speed improve, but device structure becomes more complex
Solution Approach 1:
The patent uses an inductive coil as an intermediary element to sense current through electromagnetic induction. The coil detects changes in current by measuring induced voltage, providing accurate and rapid current sensing without requiring direct electrical contact with the current-carrying path. This intermediary approach enables precise measurement while maintaining a relatively simple integrated structure within the MEMS device.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate, rapid, and reliable current sensing and overcurrent protection within the MEMS switch device, reducing user costs and enhancing device reliability by integrating these functions into a single package.
Implementation Method 1
an inductive coil 204 of the movable plate 116, electrically coupled to the shunt 122
Data Source
AI summary
A microelectromechanical systems (MEMS) switch device including current sensing and overcurrent protection can include a movable plate movable between an open position and a closed position, wherein the moveable plate is moved by applying at least one or more of an electrostatic force and a magnetic force to move the movable plate. The movable plate can include a shunt operable to conduct current when the movable plate is the closed position. An inductive coil electronically coupled to the shunt can detect current conducted through the shunt.