Multi-Deformation MEMS Switch for Isolation and Contact Force

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Solution Overview

Problem

Existing MEMS switches face challenges in achieving both infinite electrical isolation in the open state and perfect electrical contact in the closed state without compromising performance or increasing manufacturing costs.

Innovation Solution

A MEMS switch design incorporating at least two deformable elements, including a contact membrane, contact zone base, and anchoring base, each actuated independently to enhance isolation in the open state and contact force in the closed state, using electrostatic, thermal, piezoelectric, or magnetic actuation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a single deformable element is used in conventional MEMS switches, then the device complexity is low and manufacturing is simpler, but the contact force in closed state and isolation in open state cannot be simultaneously optimized

Engineering Contradiction:

Improveelectrical isolation and contact forceVSAvoidnumber of deformable elements

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The single deformable element is segmented into multiple independent deformable elements (first deformable element for contact membrane, second deformable element for contact zone base, third deformable element for anchoring base). Each element can be actuated independently to control the contact membrane's position, enabling separate optimization of contact force and isolation distance without requiring a single complex element.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The deformable elements are arranged in a nested hierarchical structure where the first deformable element (contact membrane) is positioned above the second deformable element (contact zone base), which in turn is positioned above the third deformable element (anchoring base). This nested arrangement allows each element to contribute to the overall deformation and control the contact force and isolation distance simultaneously.

Inventive Principle:

Principle #7Nested doll (Nesting)

2Reliability

If larger membranes and specific materials are used to approach ideal MEMS performance, then electrical isolation and contact force improve, but manufacturing costs increase

Engineering Contradiction:

Improveelectrical isolation and contact forceVSAvoidmanufacturing cost

Core Design Contradiction:

ReliabilityVSEase of manufacture

Solution Approach 1:

Instead of changing material properties or membrane size to improve performance, the invention changes the structural parameters by introducing multiple deformable elements with independent actuation. This allows optimization of contact force and isolation distance through geometric and configurational parameters rather than material selection, thereby controlling manufacturing costs.

Inventive Principle:

Principle #35Parameter changes

3Reliability

If multiple deformable elements with independent actuation are introduced, then contact force and isolation distance are enhanced, but the device complexity and manufacturing difficulty increase

Engineering Contradiction:

Improvecontact force and isolation distanceVSAvoidnumber of deformable elements and actuation mechanisms

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The multiple deformable elements are merged into a single integrated switch structure where the first deformable element (contact membrane), second deformable element (contact zone base), and third deformable element (anchoring base) work together as a unified system. This merging allows the complex functionality to be achieved through coordinated deformation of integrated elements rather than separate components.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves improved contact force and isolation distance, allowing for higher current carrying capacity and voltage isolation, while using conventional materials to reduce manufacturing costs.

Implementation Method 1

using electrostatic, thermal, piezoelectric, or magnetic actuation

Methodology Applied

Scientific EffectElectrostatic actuation: Electrostatics

Implementation Method 2

using electrostatic, thermal, piezoelectric, or magnetic actuation

Methodology Applied

Scientific EffectThermal actuation: Thermal Expansion

Implementation Method 3

using electrostatic, thermal, piezoelectric, or magnetic actuation

Methodology Applied

Scientific EffectPiezoelectric actuation: Piezoelectric Effect

Implementation Method 4

using electrostatic, thermal, piezoelectric, or magnetic actuation

Methodology Applied

Scientific EffectMagnetic actuation: Magnetism

Data Source

PatentUS20260045424A1MEMS switch with multiple deformations and switch comprising one or more MEMS switches

Publication Date: 2026.02.12 AIRMEMS

AI summary

A MEMS switch, comprising a substrate, at least one signal input line, at least one signal output line, at least one contact zone formed on a contact zone base integral with the substrate, and a contact membrane held by at least one anchoring base integral with the substrate, wherein for each contact zone, the contact membrane constitutes a first entity, the contact base constitutes a second entity and the at least one anchoring base constitutes a third entity, and at least two entities from among the first entity, the second entity and the third entity are deformable, each by an independent actuating means, in order to move the contact membrane towards or away from the contact zone.