MEMS Switch Electrode Structure for Stable Off-State Isolation
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Solution Overview
Problem
Existing MEMS elements face challenges in maintaining stable operation due to parasitic capacitance and unstable electrical characteristics, particularly in high-frequency switching scenarios, where the breakage of conductive members leads to unstable off-states.
Innovation Solution
The MEMS element design includes a first and second conductive member with asymmetric rigidity and positioning, where the first conductive member is supported by a first and second supporter to separate from the movable electrode after an electrical signal is applied, ensuring stable separation and blocking current flow, and the second conductive member supports the movable electrode to maintain separation from the fixed electrode.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conductive member is used to support the movable electrode in MEMS elements, then the electrical connection is improved, but parasitic capacitance increases and causes unstable off-state characteristics
Solution Approach 1:
The patent extracts and removes the conductive member from the system after it has served its purpose during the on-state. The conductive member is designed to break away from the movable electrode when a breakdown voltage is applied, thereby eliminating the source of parasitic capacitance and stabilizing the off-state characteristics.
Solution Approach 2:
The conductive member is intentionally designed as a sacrificial element that is discarded (broken) after completing its function of providing electrical connection during the on-state. This deliberate discarding eliminates parasitic capacitance in the off-state, while the breakdown process itself is controlled and recoverable through voltage application.
2Speed
If high-frequency signals are applied to the MEMS element, then the switching speed is improved, but the unstable off-state characteristics due to parasitic capacitance become more significant
Solution Approach 1:
The patent removes the parasitic capacitance source by extracting the conductive member from the electrical connection in the off-state through controlled breakdown. This ensures that even at high frequencies, the off-state remains stable without residual capacitance effects that would degrade switching performance.
3Strength
If the conductive member is made more rigid to maintain structural stability, then the mechanical strength is improved, but the ability to separate from the movable electrode reliably is reduced
Solution Approach 1:
The patent applies different mechanical properties to different parts of the conductive member. The portion connected to the movable electrode is designed with lower rigidity to enable reliable breakdown and separation, while other portions maintain sufficient strength for structural support. This local differentiation of mechanical properties resolves the contradiction between overall rigidity and separation reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design stabilizes the off-state characteristics even under high-frequency signals by ensuring the first conductive member breaks reliably, reducing parasitic capacitance and maintaining stable electrical performance.
Implementation Method 1
when a first breakdown voltage is applied between a second conductive member and a first fixed electrode, the first conductive member is separated from the first movable electrode
Implementation Method 2
the first movable electrode is supported by the first and second conductive members to be separated from the first fixed electrode
Data Source
AI summary
According to one embodiment, a MEMS element includes a first member, and an element part. The element part includes a first fixed electrode fixed to the first member, and a first movable electrode facing the first fixed electrode, a first conductive member electrically connected with the first movable electrode, and a second conductive member electrically connected with the first movable electrode. The first movable electrode is supported by the first and second conductive members to be separated from the first fixed electrode in a first state before a first electrical signal is applied between the second conductive member and the first fixed electrode. The first conductive member is separated from the first movable electrode in a second state after the first electrical signal is applied. The first movable electrode is supported by the second conductive member to be separated from the first fixed electrode in the second state.