Electrostatic/Electro-Adhesion Relays TRIZ Cases
- Ruthenium MEMS Contacts With Etch-Back for Low Resistance and Less Stiction
Chlorine etch-back and fluorine plasma conditioning lower ruthenium MEMS contact resistance while reducing stiction risk over device life.
- EAP Conductive Particle Interconnect Switching Under Thermal Cycling
An electroactive polymer interconnect shifts particle contact states to maintain conductivity and prevent switch glitches during thermal cycling.
- Offset Pull-Down Electrode Layout for Low-Capacitance MEMS Switches
Offset pull-down electrodes break the off-state capacitive path in MEMS switches, improving isolation and reducing electrical loss.
- Electromechanical Switch Beam Actuation for Stable Contact Closure
A two-stage electrostatic actuator bends a switch beam to cut closure oscillations and impact velocity, improving contact stability and lifespan.
- Fringing-Field Electromechanical Switch for Stable Contact Closure
Fringing-field actuation bends the switch beam with controlled electrostatic force to cut oscillations, lower contact speed, and extend switch life.