Metal Boride Electron Emitters with Rounded Tips

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Boride compound thermionic emitters, such as LaB6, face issues with oxidation and sublimation at operating temperatures, leading to mass loss and instability in electron gun assemblies, particularly in triode configurations, due to high partial pressures of moisture and organic contaminants, limiting their use in high-brightness applications.

Innovation Solution

A metal boride electron emitter with a rounded tip of 1 μm or less radius is developed, utilizing materials like LaB6, which can operate in various field emission modes, including cryogenic, room temperature, and thermal modes, with a controlled crystal orientation and vacuum environment to minimize oxidation and contamination, enhancing stability and brightness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If the cathode operating temperature is increased to improve electron emission, then the brightness and emission performance are improved, but the mass loss via oxidation and sublimation increases

Engineering Contradiction:
Improveelectron brightnessVSAvoidcathode mass loss
Core Design Contradiction:
Illumination intensityVSLoss of substance

Solution Approach 1:

The patent applies this principle by maintaining the cathode in a high vacuum environment (10^-9 to 10^-11 Torr) which acts as an inert atmosphere free of oxidants. This allows the cathode to operate at high temperatures (1500-2000K) for improved brightness without suffering oxidation damage, as the vacuum prevents reactive gas molecules from reaching and oxidizing the cathode surface.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

Solution Approach 2:

The patent applies this principle by performing preliminary cleaning of the cathode surface through ion bombardment or flash heating before electron emission begins. This preliminary action removes any adsorbed contaminants or oxide layers that would otherwise cause mass loss or emission instability, allowing the cathode to achieve optimal brightness performance without degradation.

Inventive Principle:
Principle #10Preliminary action

2Loss of substance

If the cathode operating temperature is reduced to decrease mass loss rate, then the material deposition on Wehnelt electrode is reduced, but the emitting surface becomes easily poisoned by organic contaminants

Engineering Contradiction:
Improvecathode mass loss rateVSAvoidemission stability
Core Design Contradiction:
Loss of substanceVSReliability

Solution Approach 1:

The patent maintains a high vacuum environment (10^-9 to 10^-11 Torr) that serves as an inert atmosphere, preventing organic contaminants from adsorbing onto the cathode surface even at reduced operating temperatures. This allows the system to operate at lower temperatures with reduced mass loss while maintaining emission stability through the protective vacuum environment.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

Solution Approach 2:

The patent applies periodic flash heating or ion bombardment cycles to clean the cathode surface at intervals during operation. This periodic action removes accumulated contaminants before they can poison the emitting surface, allowing stable emission to be maintained at lower operating temperatures where continuous contamination removal is not feasible.

Inventive Principle:
Principle #19Periodic action

3Quantity of substance

If a triode electron gun configuration is used with large emitting area, then the current capacity is increased, but the source brightness is limited by space charge effects

Engineering Contradiction:
Improveelectron currentVSAvoidsource brightness
Core Design Contradiction:
Quantity of substanceVSIllumination intensity

Solution Approach 1:

The patent segments the electron emission process by using a multi-component cathode structure with different materials (e.g., LaB6 core with HfB2 coating) that have complementary properties. The inner material provides high current capacity while the outer coating maintains low work function for high brightness, allowing both large emitting area and high source brightness to be achieved simultaneously.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs composite cathode materials combining different boride compounds (such as LaB6 and HfB2) to achieve optimal performance. The composite structure provides both high current capacity from the bulk material and high brightness from the surface properties, resolving the contradiction between current quantity and source brightness in triode configurations.

Inventive Principle:
Principle #40Composite materials

4Reliability

If complex vacuum technology improvements are implemented to protect boride compound cathodes, then the cathode stability is improved, but the device complexity increases

Engineering Contradiction:
Improvecathode stabilityVSAvoidvacuum system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent achieves cathode stability by maintaining a simple high vacuum environment (10^-9 to 10^-11 Torr) without requiring complex protective measures. The vacuum itself serves as the protective inert atmosphere, eliminating the need for additional protective coatings, encapsulation layers, or complex vacuum maintenance systems that would increase device complexity.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

Solution Approach 2:

The cathode design incorporates self-cleaning capabilities through ion bombardment or flash heating that automatically remove contaminants during normal operation. This self-service mechanism maintains cathode stability without requiring external intervention or complex vacuum system modifications, keeping the overall device complexity low while ensuring reliable operation.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The reduced emitting area and controlled environment significantly increase the brightness and longevity of the emitter, allowing for high-brightness, stable operation in electron optical systems, while reducing redesign costs by compatibility with existing systems.

Implementation Method 1

The emitter can be used for field emission, thermal field emission, thermionic emission, or other electron emission

Methodology Applied
Scientific EffectField emission: Electron Beam

Implementation Method 2

These materials have physical and chemical properties that make boride compound cathodes superior to tungsten thermionic cathodes

Methodology Applied
Scientific EffectThermionic emission: Thermionic Emission

Data Source

PatentUS9984846B2High brightness boron-containing electron beam emitters for use in a vacuum environment
Publication Date: 2018.05.29 KLA CORP
  • US9984846B2 patent drawing
  • US9984846B2 patent drawing
  • US9984846B2 patent drawing

AI summary

An emitter containing a metal boride material has an at least partly rounded tip with a radius of 1 μm or less. An electric field can be applied to the emitter and an electron beam is generated from the emitter. To form the emitter, material is removed from a single crystal rod to form an emitter containing a metal boride material having a rounded tip with a radius of 1 μm or less.