Metal-Ceramic Substrate Direct Exposure for Precise Structuring
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Solution Overview
Problem
Conventional methods for structuring metal-ceramic substrates using photolithography face issues such as positioning inaccuracies, high energy requirements, film-related errors, and poor process economy, particularly due to the use of films that need manufacturing and checking for dimensional accuracy before each use.
Innovation Solution
A direct exposure system is used to project light directly onto the metal-ceramic substrate without films, utilizing lasers or projectors, and an image processing system to detect the substrate's position for precise layout adaptation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional photolithography with films is used for structuring metal-ceramic substrates, then the structuring process can be performed, but positioning accuracy deteriorates due to film-substrate alignment errors and mechanical stop shadowing
Solution Approach 1:
The patent removes the film component entirely from the structuring process, replacing it with direct optical projection onto the metal-ceramic substrate. This extraction eliminates the positioning errors associated with film-substrate alignment and mechanical stop shadowing, directly improving manufacturing precision while reducing device complexity.
Solution Approach 2:
The patent replaces the mechanical film handling and positioning system with an optical direct projection system. This substitution eliminates mechanical stops that cause shadowing and film positioning errors, achieving superior positioning accuracy through non-contact optical methods.
2Area of stationary object
If the entire exposure space is illuminated for structuring, then complete coverage is achieved, but energy consumption increases
Solution Approach 1:
The patent applies local quality by illuminating only the specific areas of the metal-ceramic substrate that require structuring, rather than illuminating the entire exposure space. This selective local illumination reduces energy consumption while maintaining complete coverage of the required areas.
Solution Approach 2:
The patent uses partial action by providing illumination only where needed for structuring purposes. Instead of excessive full-space illumination, the system delivers the minimum necessary light energy to the target areas, reducing overall energy consumption while achieving complete functional coverage.
3Manufacturing precision
If films are manufactured and checked for dimensional accuracy before each use, then exposure quality can be maintained, but process time and complexity increase
Solution Approach 1:
The patent extracts the film preparation steps (manufacturing and dimensional checking) from the process entirely by using direct optical projection. This eliminates the time-consuming film preparation workflow while maintaining manufacturing precision through digital layout projection that inherently possesses dimensional accuracy.
Solution Approach 2:
The patent uses digital copying of the substrate layout information to generate the exposure pattern directly, replacing the physical film copy process. This digital copying method inherently maintains dimensional accuracy without requiring manual film manufacturing and checking, significantly reducing preparation time.
4Ease of manufacture
If films are used for exposure, then layout can be applied to substrate, but film wear and disposal issues arise
Solution Approach 1:
The patent replaces the mechanical film-based layout application system with an optical direct projection system. This substitution eliminates physical film wear and the associated disposal issues, while maintaining ease of manufacture through digital layout generation and projection.
Solution Approach 2:
The patent uses digital copying to transfer the layout information directly to the substrate via optical projection, replacing the physical film copy. This eliminates the consumable film material that wears and requires disposal, while maintaining the ease of layout application through flexible digital design and projection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method eliminates film-related errors and improves positioning accuracy, reduces energy consumption, and enhances process economy by eliminating the need for film manufacturing and handling, thus providing a more efficient structuring process.
Implementation Method 1
Instead, they project the layout directly onto the light-sensitive layer of the metal-ceramic substrate using lasers or projectors
Implementation Method 2
all areas of the laminate not covered by the film, i.e., darkened, are exposed to a strong light source
Data Source
Figure 1~3
Figure 4~5
AI summary
Specific metal-ceramic substrates and their application in a direct exposure process are described.