Metrology Beam-Modifying Modules with Selection Optics for Fast Switching
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Solution Overview
Problem
Existing metrology apparatuses face challenges in efficiently and quickly switching between different radiation beam attributes for multiple measurements, limiting throughput and the range of available beam attributes.
Innovation Solution
A metrology apparatus with a selection optics system and multiple beam-modifying modules that can rapidly switch between configurations, allowing simultaneous preparation of different beam attributes for successive measurements, reducing configuration time and enhancing attribute range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single beam-modifying module is used for multiple measurements, then device complexity is reduced, but throughput decreases due to sequential reconfiguration time
Solution Approach 1:
The system divides the beam-modifying functionality into multiple independent modules, each dedicated to a specific measurement type or attribute configuration. This segmentation allows parallel operation where one module serves the current measurement while another prepares for the next measurement, eliminating sequential reconfiguration delays and improving throughput.
Solution Approach 2:
The system performs preliminary configuration of beam attributes by pre-setting multiple beam-modifying modules for different measurement requirements before measurements begin. This allows the system to switch between pre-configured modules rapidly without requiring time-consuming reconfiguration during the measurement sequence, thereby increasing throughput.
2Productivity
If beam-modifying module reconfiguration time is reduced, then throughput improves, but measurement precision may deteriorate due to insufficient stabilization time
Solution Approach 1:
By segmenting the beam-modifying system into multiple independent modules, the patent enables one module to be used for measurements while another module is being reconfigured for the next measurement. This eliminates the need to interrupt measurements for reconfiguration, maintaining both high throughput and measurement precision without compromising stabilization time.
3Adaptability or versatility
If the range of beam attributes is expanded, then adaptability improves, but device complexity increases due to additional beam-modifying modules
Solution Approach 1:
The patent designs beam-modifying modules with universal, multi-functional capabilities that can generate multiple different beam attributes (wavelengths, polarizations, focal points) within a single module. This reduces the total number of modules needed while still providing a comprehensive range of beam attributes, balancing adaptability with manageable device complexity.
Solution Approach 2:
The system expands the range of beam attributes by adding control in additional dimensions rather than simply adding more modules. For example, using tunable elements within modules that can adjust multiple parameters (wavelength, focal length, polarization state) independently, effectively multiplying the available attribute combinations without proportionally increasing module count.
Data Source
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AI summary
An apparatus for use in a metrology apparatus comprises: selection optics; and a plurality of beam-modifying modules. The selection optics is arranged to receive an input radiation beam and is configurable so as direct the radiation beam to any one of the plurality of beam-modifying modules. Each of the plurality of beam-modifying modules is arranged to control the same at least one attribute of the radiation beam (for example wavelength, polarization, size, shape etc.). The selection optics may be arranged to receive secondary radiation output by any one of the plurality of beam-modifying modules and may be configurable so as direct the secondary radiation received from any one of the plurality of beam-modifying modules to a common output. A timescale for switching between two configurations of any one of the beam-modifying module may be larger than a timescale for switching between two configurations of the selection optics.