Micro-conformal Nanoimprint Lithography Template for Defect Conformality

Solution Overview

Problem

Current nanoimprint lithography techniques face challenges in achieving conformality over substrates with micron-scale defects due to high elastic modulus of rigid templates, leading to pattern transfer inefficiencies and feature distortions, while soft templates suffer from roof collapse and surface tension-related deformations.

Innovation Solution

A micro-conformal nanoimprint lithography template comprising a backing layer with a higher elastic modulus than the nanopatterned layer, where the nanopatterned layer is silicon-containing and coated with an oxidized layer to enhance conformality and feature fidelity, allowing multiple imprints without reduction in pattern quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a rigid template with high elastic modulus is used, then template strength and durability are improved, but conformality over micron-scale defects deteriorates

Engineering Contradiction:

Improvetemplate strengthVSAvoidconformality

Core Design Contradiction:

StrengthVSManufacturing precision

Solution Approach 1:

The template is divided into two functional layers: a rigid backing layer for structural support and a soft nanopatterned layer for conformal contact. This segmentation allows each layer to perform its specialized function without compromising the other.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The template uses a composite structure combining a rigid inorganic backing layer (glass or silicon) with a soft organic nanopatterned layer (silicon-containing polymer). This composite material approach integrates the advantages of both rigid and soft materials in a single template system.

Inventive Principle:

Principle #40Composite materials

2Manufacturing precision

If a soft template with low elastic modulus is used, then conformality over defects is improved, but roof collapse and lateral collapse occur

Engineering Contradiction:

ImproveconformalityVSAvoidfeature fidelity

Core Design Contradiction:

Manufacturing precisionVSStability of the object's composition

Solution Approach 1:

The template is divided into two functional layers: a rigid backing layer for structural support and a soft nanopatterned layer for conformal contact. This segmentation allows each layer to perform its specialized function without compromising the other.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The nanopatterned layer is designed as a thin film (50-500 nm) that provides flexibility for conformal contact while the backing layer provides the mechanical support needed to prevent collapse. The thin film structure allows the soft layer to conform to defects without having enough bulk material to cause roof or lateral collapse.

Inventive Principle:

Principle #30Flexible shells and thin films

3Ease of manufacture

If a single-layer soft template is used, then ease of manufacture is improved, but pattern fidelity deteriorates due to surface tension

Engineering Contradiction:

Improvetemplate fabricationVSAvoidpattern fidelity

Core Design Contradiction:

Ease of manufactureVSManufacturing precision

Solution Approach 1:

The template uses a composite structure combining a rigid inorganic backing layer (glass or silicon) with a soft organic nanopatterned layer (silicon-containing polymer). This composite material approach integrates the advantages of both rigid and soft materials in a single template system.

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The micro-conformal template achieves improved conformality and longevity, maintaining feature fidelity across multiple imprints with reduced excluded distance over micron-scale defects, and demonstrates UV transparency and ease of processing at room temperature.

Implementation Method 1

Surface tension-related deformation can occur in elastomeric patterned layers

Methodology Applied

Scientific EffectSurface tension: Surface Tension

Implementation Method 2

an oxidized layer on the nanopatterned surface... to enhance conformality

Methodology Applied

Scientific EffectWetting: Wetting

Implementation Method 3

The formable liquid is solidified to form a rigid layer

Methodology Applied

Scientific EffectPhotopolymerization: Photopolymerisation

Implementation Method 4

The formable liquid is solidified to form a rigid layer

Methodology Applied

Scientific EffectPhase change: Phase Change

Data Source

PatentUS8616873B2Micro-conformal templates for nanoimprint lithography

Publication Date: 2013.12.31 MOLECULAR IMPRINTS INC

AI summary

A micro-conformal nanoimprint lithography template includes a backing layer and a nanopatterned layer adhered to the backing layer. The elastic modulus of the backing layer exceeds the elastic modulus of the nanopatterned layer. The micro-conformal nanoimprint lithography template can be used to form a patterned layer from an imprint resist on a substrate, the substrate having a micron-scale defect, such that an excluded distance from an exterior surface of the micron-scale defect to the patterned layer formed by the nanoimprint lithography template is less than a height of the defect. The nanoimprint lithography template can be used to form multiple imprints with no reduction in feature fidelity.