Micro-electron Column Induction Electrode Electron Beam Density
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional micro-electron columns require high voltage for electron emission and struggle to efficiently direct electrons into the aperture of the source lens, limiting electron beam density and resolution, especially in applications like semiconductor and display manufacturing where microstructures are becoming increasingly complex.
Innovation Solution
A micro-electron column design featuring nanostructure tips with an induction electrode between the electron emitter and the source lens, allowing electrons to be emitted at low voltage and efficiently directed into the aperture of the source lens, increasing electron beam density, and utilizing a multi-type configuration for improved productivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If high voltage is applied to conventional electron emitters, then electron emission is achieved, but the electron beam density is limited and electrons cannot be efficiently directed into the aperture of the source lens
Solution Approach 1:
An induction electrode is introduced as an intermediary component between the electron emitter and the source lens. This induction electrode generates an electric field that guides and focuses electrons toward the aperture of the source lens, improving electron beam density without requiring high voltage at the emitter itself. The induction electrode acts as a mediator that enhances electron directionality and concentration in the aperture region.
2Quantity of substance
If high voltage is used for electron emission, then electrons are emitted, but the complexity of the device increases and manufacturing costs rise
Solution Approach 1:
The invention changes the voltage distribution parameters in the electron column system. Instead of applying high voltage at the electron emitter, the system uses low voltage at the emitter combined with an induction electrode that creates a localized high electric field region near the aperture. This parameter change reduces the overall voltage system complexity while maintaining effective electron emission and guidance.
3Measurement precision
If conventional electron emitters are used, then electron emission is achieved, but the resolution is limited due to low electron beam density
Solution Approach 1:
The induction electrode serves as an intermediary that concentrates and directs electrons into the aperture of the source lens, significantly increasing electron beam density. This higher electron beam density improves the signal-to-noise ratio and measurement precision, thereby enhancing resolution in electron microscopy and lithography applications.
4Productivity
If multiple electron emitters are arranged in parallel, then productivity is improved, but the device complexity and manufacturing difficulty increase
Solution Approach 1:
The invention divides the electron emission function into multiple independent emitter units that can be arranged in parallel or series configurations. Each emitter unit operates independently with its own induction electrode, allowing modular assembly and simplified manufacturing. This segmentation enables high productivity through multi-emitter operation while keeping individual unit complexity manageable.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enables electron emission at low voltage, enhances electron beam density, and reduces manufacturing costs by allowing multiple emitters on a single substrate, improving resolution and productivity in micro-electron column applications.
Implementation Method 1
an induction electrode disposed between the electron emitter and the source lens so as to help electrons from the electron emitter to enter the aperture of a first lens electrode layer of the source lens
Implementation Method 2
a high electric field is generated at the end of the nanostructure tips when a voltage is applied thereto
Data Source
AI summary
Disclosed is a micro-electron column including nanostructure tips each of which has a tubular, columnar, or blocky structure ranging in size from several nanometers to dozens of nanometers. In the micro-electron column, the nanostructure tips can easily emit electrons because a high electric field is generated at the end of the nanostructure tips when a voltage is applied to the nanostructure tips, and an induction electrode is disposed between the electron emitter and a source lens so as to help electrons emitted from the electron emitter to enter an aperture of a first lens electrode layer of the source lens, thereby realizing improved performance of the micro-electron column. In the micro-electron column, the size of the nanostructure tips may be larger than that of the aperture of a source lens.