Micro-fabricated Atomic Magnetometer Integration

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Solution Overview

Problem

Conventional atomic magnetometers are limited by their size and cost, restricting their commercial applications due to the complexity and expense of their production processes.

Innovation Solution

A micro-fabricated atomic magnetometer is developed using conventional integrated circuit fabrication techniques, incorporating a photo detection die with a semiconductor substrate and a vapor cell die with a hermetically sealed vapor cavity containing alkali and buffer atoms, enabling mass production and reducing size and cost.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If conventional atomic magnetometer designs are used, then measurement functionality is maintained, but device size and manufacturing cost increase

Engineering Contradiction:
Improvedevice sizeVSAvoidmanufacturing complexity
Core Design Contradiction:
Volume of moving objectVSEase of manufacture

Solution Approach 1:

The patent merges multiple discrete components (vapor cell, optics package, photo detector, and mounting structure) into a single integrated device. The vapor cell is hermetically sealed within a housing that directly mounts the optics package and photo detector, eliminating the need for separate alignment and assembly procedures. This integration maintains measurement functionality while reducing overall device size and simplifying manufacturing.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The housing structure serves multiple functions simultaneously: it provides hermetic sealing for the vapor cell, mounts the optics package and photo detector, provides structural support, and enables direct coupling between components. This multi-functionality reduces the number of separate parts needed, thereby reducing device size and manufacturing complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Ease of manufacture

If conventional atomic magnetometer designs are used, then measurement functionality is maintained, but manufacturing cost increases

Engineering Contradiction:
Improvemanufacturing costVSAvoidproduction process complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

By combining the vapor cell, optics package, and photo detector into a single integrated assembly with a unified housing, the patent reduces the number of discrete components that need to be manufactured and assembled. This integration simplifies the production process, reduces assembly steps, and lowers manufacturing costs while maintaining measurement functionality.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The vapor cell is hermetically sealed within the housing during the manufacturing process, establishing a stable, pre-aligned configuration before deployment. This preliminary sealing and mounting action eliminates the need for complex post-assembly alignment procedures and reduces the risk of misalignment during operation, thereby simplifying production and reducing costs.

Inventive Principle:
Principle #10Preliminary action

3Volume of moving object

If device size is reduced through micro-fabrication, then affordability and applicability improve, but manufacturing precision requirements increase

Engineering Contradiction:
Improvedevice sizeVSAvoidfabrication precision
Core Design Contradiction:
Volume of moving objectVSManufacturing precision

Solution Approach 1:

The patent integrates multiple components into a compact housing where the vapor cell, optics package, and photo detector are closely coupled. This integration allows for micro-fabrication techniques to be used, reducing device size while the unified housing structure provides inherent alignment tolerances that mitigate the need for extremely high manufacturing precision in individual components.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The hermetic seal between the vapor cell and housing uses flexible sealing mechanisms that can accommodate minor dimensional variations and alignment tolerances. This flexibility allows the device to be miniaturized through micro-fabrication without requiring extremely tight manufacturing precision, as the sealing structure compensates for small variations in component dimensions.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The micro-fabricated atomic magnetometer allows for the mass production of smaller, more affordable devices, expanding their applicability beyond traditional limitations, while maintaining the functionality of detecting magnetic fields through the Larmor frequency.

Implementation Method 1

An atomic magnetometer is a device that measures the strength of a magnetic field by determining a frequency known as the Larmor frequency. The Larmor frequency, in turn, is the frequency of the magnetic moment of a contained group of in-phase, spinning, outer shell electrons of alkali atoms moving in precession in response to the magnetic field.

Methodology Applied
Scientific EffectLarmor frequency:

Implementation Method 2

The light output by VCSEL 110 is tuned to a frequency which, when circularly polarized, is absorbed by the single electrons in the outer shells of the alkali atoms in the gas 118 contained within vapor cell 114.

Methodology Applied
Scientific EffectAbsorption of light by alkali atoms: Absorption (EM radiation)

Data Source

PatentUS8836327B2Micro-fabricated atomic magnetometer and method of forming the magnetometer
Publication Date: 2014.09.16 TEXAS INSTRUMENTS INC
  • US8836327B2 patent drawing
  • US8836327B2 patent drawing
  • US8836327B2 patent drawing

AI summary

The cost and size of an atomic magnetometer are reduced by attaching a vapor cell structure that has a vapor cell cavity to a base die that has a laser light source that outputs light to the vapor cell cavity, and attaching a photo detection die that has a photodiode to the vapor cell structure to detect light from the laser light source that passes through the vapor cell cavity.