Micro-Fluidic Jet Impingement Cooling in Chip Packages

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Solution Overview

Problem

Conventional thermal management systems are inadequate for efficiently cooling high-power electronic devices, such as GaN microwave amplifiers, due to increased heat flux and power densities, which limits their performance.

Innovation Solution

Integration of micro-fluidic jet impingement cooling within electronic chip packages, utilizing a dielectric substrate with impingement openings for pressurized fluid to directly cool heat-generating components, reducing thermal resistance by eliminating intermediate materials and enhancing heat transfer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If conventional remote cooling systems with multiple intermediate material layers are used, then device packaging and assembly are simplified, but thermal resistance increases and cooling effectiveness decreases

Engineering Contradiction:
Improvejunction temperatureVSAvoidcooling system structure
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent removes intermediate material layers (solder, epoxy, ceramic) between the heat-generating device and the coolant, extracting the thermal resistance elements from the heat transfer path. This leaves only essential structural layers, dramatically reducing thermal resistance while maintaining packaging simplicity.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The substrate serves multiple functions: it provides mechanical support for the device, acts as a thermal management component by containing the coolant reservoir and cooling channels, and enables direct thermal coupling between the device and coolant. This multi-functionality eliminates the need for separate cooling components, reducing system complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Ease of manufacture

If multiple intermediate material layers are used in cooling systems, then device assembly is easier, but heat transfer efficiency deteriorates

Engineering Contradiction:
Improvedevice assemblyVSAvoidheat transfer efficiency
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent extracts non-essential intermediate material layers that contribute thermal resistance. The substrate is designed to contain only the necessary structural and cooling functions, removing solder layers, epoxy layers, and ceramic layers that impede heat transfer while maintaining ease of assembly through integrated manufacturing.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the thermal parameter of the cooling system by reducing the number and thickness of intermediate layers. This parameter change dramatically improves heat transfer efficiency while the substrate's integrated design maintains manufacturing simplicity through standardized fabrication processes.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If conventional cooling techniques are used, then system design is straightforward, but cooling capability is insufficient for high power densities

Engineering Contradiction:
Improvecooling system designVSAvoidheat dissipation capability
Core Design Contradiction:
Device complexityVSProductivity

Solution Approach 1:

The patent employs liquid coolant flowing through channels in the substrate to remove heat from the device. This hydraulic cooling approach provides superior heat dissipation capability compared to air cooling or conventional heat sinks, enabling the system to handle high power densities while maintaining relatively simple design through the substrate's integrated cooling channels.

Inventive Principle:
Principle #29Pneumatics and hydraulics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces thermal resistance, allowing for lower operating temperatures or increased heat dissipation, thereby improving the performance and efficiency of high-power electronic devices.

Implementation Method 1

A plurality of impingement openings are formed through the body, with each impingement opening configured to be responsive to a source of pressurized fluid for generating a fluid stream to be expelled in a direction of the electronic device

Methodology Applied
Scientific EffectForced Convection: Forced Convection

Data Source

PatentUS10211127B1Integration of chip level micro-fluidic cooling in chip packages for heat flux removal
Publication Date: 2019.02.19 LOCKHEED MARTIN CORP
  • US10211127B1 patent drawing
  • US10211127B1 patent drawing
  • US10211127B1 patent drawing

AI summary

An electronic chip package includes a base defining a fluid inlet opening for receiving pressurized fluid from a fluid source and a fluid outlet opening. A dielectric body is arranged on the base and configured to support an electronic device. The dielectric body comprises a coolant flow chamber formed in a first surface thereof, and a plurality of impingement openings formed within the coolant flow chamber. The plurality of impingement openings are in communication with the fluid inlet opening of the base for generating a plurality of fluid streams to be expelled into the coolant flow chamber. The body further comprises a coolant return port formed within the coolant flow chamber and in communication with the fluid outlet opening of the base.