Micro-Transfer Printed Compound Optical Filter Device
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Solution Overview
Problem
Conventional methods for constructing optical filters in electro-optical devices are wasteful and time-consuming, requiring sequential deposition processes and using only a portion of the optical filter layer materials, which limits manufacturing efficiency and increases costs.
Innovation Solution
The integration of a separate optical filter substrate with micro-transfer printing onto a semiconductor substrate, allowing for the formation of multiple optical filters with different materials and characteristics at higher densities, reducing waste and manufacturing time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional sequential deposition processes are used to form optical filters, then the light sensor can be made first before the optical filter is applied, but this increases the elapsed manufacturing time and is very wasteful of materials
Solution Approach 1:
The invention divides the optical filter into multiple discrete layers that can be independently patterned and transferred. Each layer is formed as a separate entity on its own substrate, then selectively transferred to the light sensor. This segmentation allows precise material placement, reducing waste from conventional blanket deposition methods where most material is discarded after lift-off or shadow mask patterning.
Solution Approach 2:
The optical filter layers are pre-formed and patterned on a separate substrate before being transferred to the light sensor. This preliminary action allows the filter layers to be manufactured independently using optimized processes, and then precisely positioned and attached to the light sensor in a single transfer step, eliminating the need for sequential deposition directly on the sensor.
2Adaptability or versatility
If conventional sequential deposition processes are used to form multiple optical filters, then each filter must be deposited sequentially, but this leads to further waste in materials and time
Solution Approach 1:
Multiple optical filters are segmented into separate layers that can be independently formed on the same substrate. This allows parallel processing of different filter layers using different materials and deposition conditions, then all layers are transferred together in a single operation, eliminating sequential deposition time.
Solution Approach 2:
The invention merges multiple optical filter layers onto a single substrate, allowing them to be processed simultaneously. Different materials can be deposited in sequence on the same substrate to form multiple filters, then the entire filter assembly is transferred to the light sensor in one step, combining multiple manufacturing operations into a single transfer action.
3Device complexity
If optical filter layers are blanket deposited and patterned using resist lift-off methods, then the process can be simplified, but only the portion of the optical filter layer materials that remains after lift-off is used
Solution Approach 1:
The invention extracts the patterned optical filter layers from the sacrificial substrate after transfer. The filter layers are formed on a temporary substrate, transferred to the light sensor, and then the sacrificial substrate is removed. This extraction approach allows precise patterning without the material waste inherent in lift-off methods, as the filter layers are physically separated from the substrate rather than chemically released with significant material loss.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the creation of compound optical filter devices with improved manufacturing efficiency, reduced costs, and enhanced performance by allowing different materials to be processed separately and assembled at higher densities, thereby reducing manufacturing cycle time and costs while improving performance.
Implementation Method 1
optical filters that rely upon layers of alternating materials having different refractive indices providing constructive and destructive optical interference
Implementation Method 2
The filter substrate is micro-transfer printed on or over the semiconductor substrate
Data Source
AI summary
Embodiments of the present invention provide a compound optical filter device comprising a semiconductor substrate having an optical transducer formed on the semiconductor substrate, the optical transducer responsive to light to produce a signal or responsive to a signal to emit light. An optical filter comprises a filter substrate separate and independent from the semiconductor substrate and one or more optical filter layers disposed on the filter substrate. The filter substrate is micro-transfer printed on or over the semiconductor substrate or on layers formed over the semiconductor substrate and over the optical transducer to optically filter the light to which the optical transducer is responsive or to optically filter the light emitted by the optical transducer. In further embodiments, the optical filter is an interference filter and the semiconductor substrate includes active components that can control or operate the optical transducer.