Micro Vibrator Mounting Structure With Guard Electrode Shielding

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Solution Overview

Problem

Existing micro vibrator mounting structures suffer from electrical noise interference due to electrode surfaces on the mounting substrate, which affects the accuracy of electrostatic capacitance detection.

Innovation Solution

A mounting structure with a micro vibrator featuring a three-dimensional curved surface and a guard electrode covering the upper surfaces of electrode portions on the mounting substrate, shielding electrical interference and reducing noise.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If electrode portions are arranged to face the curved surface portion of the micro vibrator, then electrostatic capacitance detection is enabled, but electrical noise interference increases

Engineering Contradiction:

Improveelectrostatic capacitance detection accuracyVSAvoidelectrical noise interference

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

A guard electrode is introduced as an intermediary element between the detection electrode and the micro vibrator. This guard electrode is held at a fixed potential (ground or biased potential) to shield the detection electrode from electrical noise and interference, thereby improving measurement accuracy without compromising the electrostatic capacitance detection capability

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The guard electrode is strategically positioned and configured with specific geometric characteristics (such as being located between the detection electrode and the micro vibrator, and having appropriate size and shape) to provide localized electrical shielding exactly where needed, without interfering with the overall detection function

Inventive Principle:

Principle #3Local quality

2Stability of the object's composition

If the micro vibrator is mounted with connecting portion bonded to substrate, then structural stability is achieved, but hollow state of curved surface portion must be maintained

Engineering Contradiction:

Improvemounting stabilityVSAvoidmounting structure complexity

Core Design Contradiction:

Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The micro vibrator is divided into functionally distinct parts: the connecting portion for mounting and bonding to the substrate, and the curved surface portion for vibration and detection that must remain hollow. This segmentation allows each part to be optimized independently for its specific function

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The connecting portion is extracted as a separate functional element from the curved surface portion, allowing it to be bonded to the substrate while the curved surface portion maintains its hollow state. This separation enables the mounting structure to provide stability without compromising the vibration characteristics

Inventive Principle:

Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The mounting structure effectively reduces noise interference, enhancing the detection accuracy of electrostatic capacitance and improving the sensitivity of the micro vibrator.

Implementation Method 1

Methodology Applied

Scientific EffectElectrostatic shielding: Faraday Cage

Implementation Method 2

enhancing the detection accuracy of electrostatic capacitance

Methodology Applied

Scientific EffectElectrostatic capacitance detection: Capacitance

Data Source

PatentUS12492900B2Mounting structure of micro vibrator

Publication Date: 2025.12.09 DENSO CORP

AI summary

A mounting structure includes a micro vibrator and a mounting substrate. The micro vibrator includes a curved surface portion having an annular curved surface and a connecting portion extending from the curved surface portion toward an inner center position of the curved surface portion. The micro vibrator is disposed so that the connecting portion is bonded to the mounting substrate and the curved surface portion is in a hollow state free from other elements. The mounting substrate includes a plurality of electrode portions that are arranged to face and surround a rim of the curved surface portion of the micro vibrator, and spaced apart from each other, the rim being an end of the curved surface portion opposite to the connecting portion. Further, the mounting substrate includes a guard electrode.