Microdevice Support Structure With Guided Breakage for Clean Transfer
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Solution Overview
Problem
The existing mass transfer technology for forming micro-LED and mini-LED display panels often results in residual support structures during device transfer, leading to low yield and adverse effects on subsequent processes due to uncontrollable breaking of support structures during microdevice transfer.
Innovation Solution
A microdevice substrate with a guide structure on the support structures, specifically a second support portion, is designed to control the breaking position of the support structures, reducing residue and improving yield by concentrating stress on a groove or hollow structure near the microdevice, facilitating controlled breakage and removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If mass transfer technology is used to form micro-LED and mini-LED display panels, then device transfer is achieved, but residual support structures remain on the devices leading to low yield
Solution Approach 1:
The support structure is divided into a first support portion (fixed to base substrate) and a second support portion (connected to microdevice), creating a segmented structure that enables controlled breaking at a specific location to remove residual supports
Solution Approach 2:
A guide structure (groove or hollow structure) is pre-formed on the second support portion before the breaking process, concentrating stress at this predetermined location to ensure the support breaks at the correct position and minimizes residue
2Stability of the object's composition
If support structures are used to hold microdevices during transfer, then device stability is maintained, but the support structures create residue that adversely affects subsequent processes
Solution Approach 1:
The support structure is segmented into two portions with different functions: the first support portion provides stability during transfer, while the second support portion is designed to break and be removed, eliminating residue that would harm subsequent processes
Solution Approach 2:
The harmful second support portion is extracted from the system by designing it to break and be removed after serving its temporary purpose of holding the microdevice during transfer, leaving no residue to affect subsequent processes
Data Source
AI summary
Provided are a microdevice substrate, a display panel, a preparation method, and a display apparatus. The microdevice substrate includes a base substrate, multiple microdevices disposed on one side of the base substrate, and support structures. The support structures are connected to the multiple microdevices. A support structure includes a first support portion and a second support portion. The first support portion is fixedly connected to the base substrate. The second support portion is connected between a microdevice and the first support portion. The microdevice and the second support portion are suspended on the same side of the base substrate. A guide structure is disposed on the second support portion. The guide structure affects a broken position of the second support portion after being stressed.