Microdevice Transfer Substrates for Precise System Integration

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Solution Overview

Problem

Existing technologies face challenges in efficiently transferring and integrating optoelectronic microdevices onto system substrates with enhanced bonding and conductivity capabilities.

Innovation Solution

A method involving the deposition of conductive layers, patterning to form pixelated structures, and bonding contacts on a donor substrate, followed by transferring these microdevices to a system substrate, with optional intermediate processing and use of temporary materials for anchoring and separation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If microdevices are transferred from donor substrate to system substrate, then integration and productivity are improved, but bonding reliability and alignment precision deteriorate

Engineering Contradiction:
Improveintegration efficiencyVSAvoidbonding reliability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent introduces a transfer substrate as an intermediary between the donor substrate and the system substrate. The microdevice is first transferred to the transfer substrate, where it can be temporarily held and positioned, and then transferred to the final system substrate. This intermediary approach enables reliable bonding at each transfer stage while maintaining high integration efficiency, resolving the contradiction between productivity and bonding reliability.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If microdevices are transferred from donor substrate to system substrate, then integration and productivity are improved, but alignment precision deteriorates

Engineering Contradiction:
Improveintegration efficiencyVSAvoidalignment precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The transfer process is segmented into multiple stages: first transferring the microdevice from the donor substrate to the transfer substrate, then from the transfer substrate to the system substrate. Each segmentation allows for independent alignment and positioning operations, ensuring high manufacturing precision while maintaining overall productivity through the modular transfer approach.

Inventive Principle:
Principle #1Segmentation

3Reliability

If conductive layers are deposited and pixelated structures are formed, then conductivity and functionality are improved, but device complexity increases

Engineering Contradiction:
ImproveconductivityVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines multiple functional layers (conductive layers, light emitting functional layers, and pixelated structures) into an integrated microdevice structure on the donor substrate before transfer. This merging approach ensures that all conductivity and functionality requirements are met in a single integrated device, reducing the need for separate assembly steps and thereby managing device complexity while maintaining high conductivity and functionality.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables reliable integration of microdevices onto system substrates with improved bonding and conductivity, facilitating the formation of pixelated arrays and post-processing for enhanced performance.

Implementation Method 1

depositing a first conductive layer on the donor substrate, depositing a fully or partially continuous light emitting functional layer on the first conductive layer, depositing a second conductive layer on the functional layer

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Implementation Method 2

providing a bonding contact for each pixelated structure, fixing the bonding contact to a system substrate

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS12464822B2Integration of microdevices into system substrate
Publication Date: 2025.11.04 VUEREAL INC
  • US12464822B2 patent drawing
  • US12464822B2 patent drawing
  • US12464822B2 patent drawing

AI summary

In a micro-device integration process, a donor substrate is provided on which to conduct the initial manufacturing and pixelation steps to define the micro devices, including functional, e.g. light emitting layers, sandwiched between top and bottom conductive layers. The microdevices are then transferred to a system substrate for finalizing and electronic control integration. The transfer may be facilitated by various means, including providing a continuous light emitting functional layer, breakable anchors on the donor substrates, temporary intermediate substrates enabling a thermal transfer technique, or temporary intermediate substrates with a breakable substrate bonding layer.