Micro-fluidic Probe Through-Hole Fabrication via Directional Deposition
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Solution Overview
Problem
Existing methods for manufacturing micro-fluidic probes are complex and require multiple steps, making them inefficient and costly, especially when forming through-holes in pyramidal tips for cell penetration.
Innovation Solution
A simplified method involving directional deposition of materials and etching using masking layers to create through-holes in micro-fluidic probes, reducing the number of steps and allowing for controlled through-hole size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional methods are used to manufacture micro-fluidic probes with through-holes in pyramidal tips, then the probes can be produced with functional through-holes, but the manufacturing process becomes complex and requires multiple steps
Solution Approach 1:
The method performs preliminary actions by creating pyramidal pits in the substrate before depositing the first material layer. The directional deposition of second and third materials is also performed in advance to create the masking pattern before the actual etching of through-holes. This preliminary structuring simplifies the subsequent through-hole formation process by pre-establishing the geometric framework and masking layers needed for precise hole creation.
Solution Approach 2:
The invention introduces intermediate material layers (second material and third material) that serve as masking layers during the etching process. These intermediary layers are directionally deposited to create specific patterns that guide where through-holes should be formed. The masking layers act as intermediaries between the etching process and the final through-hole structure, enabling precise control over hole location and shape while simplifying the overall manufacturing sequence.
2Manufacturing precision
If multiple manufacturing steps are used to create through-holes, then precise control over through-hole size and position is achieved, but the production time and cost increase
Solution Approach 1:
The invention controls through-hole size and position by changing deposition parameters - specifically the angles and directions of material deposition. By adjusting the deposition angle to be parallel with the first pyramidal side, and then depositing from a transverse direction at a smaller angle, the method precisely controls where masking material accumulates and where gaps remain for etching. This parameter-based control eliminates the need for multiple iterative processing steps while maintaining high precision.
Solution Approach 2:
The method transitions from planar deposition to three-dimensional directional deposition by exploiting the pyramidal geometry. Material is deposited from different angular directions to create asymmetric masking patterns on the pyramidal surfaces. This dimensional approach allows precise spatial control of through-hole locations by utilizing the vertical and angular dimensions of the pyramidal structure, rather than relying on multiple lateral processing steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method reduces complexity and cost by minimizing the number of manufacturing steps, while enabling precise control over through-hole size, facilitating efficient production of micro-fluidic probes.
Implementation Method 1
directionally depositing a second layer of a second material different from the first material, said second material being a material capable of being deposited directionally and said directional depositing being performed in a first direction relatively parallel with the first pyramidal side
Implementation Method 2
edge of the pyramidal pit serves as a shadow mask so as to shield a bottom section of the first pyramidal side from being covered with said third material
Implementation Method 3
etching the exposed parts of the layer of said first material using the second layer of second material and the third layer of third material as a masking layer to provide a through-hole in the layer of first material
Data Source
AI summary
A method of manufacturing a micro-fluidic probe that is relatively simple comprises providing a pyramidal pit in a substrate with a structural layer. Then metal masking layers using directionally depositing are provided. The angles of deposition are chosen such that for one deposition step the walls are covered but at least one wall is left less or not exposed, whereas for the other deposition said at least one wall is covered except for a bottom section thereof. Thus these deposited layers can be used as masks for etching the structural layer.