Laser Transfer Mask Layout for Micro-LED Substrate Protection
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Solution Overview
Problem
The laser transfer method for micro LEDs suffers from the issue of laser beams irradiating unintended areas on the target substrate, leading to increased temperature and damage, which affects the uniformity of the pressing force and manufacturing efficiency.
Innovation Solution
A device is designed to reflect laser beams away from unintended areas by using a mask or reflective mask, combined with a pressing member and gas pressure regulation to ensure precise application on micro-LEDs, enhancing the uniformity of the pressing force.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a laser transfer method is used to transfer micro LED from relay substrate to target substrate, then the micro LED can be transferred, but the laser beam irradiates unintended areas including the target substrate causing temperature increase and damage
Solution Approach 1:
The relay substrate is divided into multiple sections with different laser absorption characteristics. The micro LED regions are selectively treated with laser beams while surrounding areas are protected, enabling precise control of laser irradiation zones to prevent damage to the target substrate.
Solution Approach 2:
A laser absorbing member is introduced as an intermediary component between the laser source and the relay substrate. This member selectively absorbs laser energy at specific locations to facilitate micro LED release and transfer, while preventing laser beams from reaching and damaging the target substrate.
2Productivity
If laser beam is applied to transfer micro LED, then transfer process is enabled, but the pressing force uniformity deteriorates due to temperature increase
Solution Approach 1:
The heating process is segmented into controlled zones where only specific regions requiring micro LED release are heated. This selective heating prevents overall temperature increase that would cause thermal expansion and pressing force non-uniformity across the entire relay substrate.
Solution Approach 2:
The laser beam is applied in periodic pulses rather than continuous irradiation. This periodic action allows heat dissipation between pulses, preventing excessive temperature accumulation that would lead to thermal expansion and pressing force instability.
3Productivity
If laser beam irradiates surrounding areas, then transfer coverage is increased, but manufacturing precision decreases due to damage to other components
Solution Approach 1:
Different regions of the relay substrate are assigned different functional properties. The micro LED regions have high laser absorption for efficient release, while surrounding regions are designed with low absorption to remain unaffected by laser irradiation, enabling precise control of laser effects to specific locations.
Solution Approach 2:
A mask or laser absorbing member serves as an intermediary that defines precise laser beam transmission paths. This intermediary component blocks laser beams from reaching unintended areas while allowing controlled irradiation of micro LED regions, thereby maintaining high manufacturing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach prevents damage to the target substrate and improves manufacturing efficiency by ensuring accurate laser application to micro-LEDs, thereby reducing defects in the display panel.
Implementation Method 1
a laser irradiation portion disposed in a front surface of the support portion and configured to irradiate the display substrate with laser light through the mask
Implementation Method 2
the elastic member is configured to expand based on an increase in gas pressure in the closed space
Implementation Method 3
the elastic member is disposed on the mask, and the elastic member is configured to expand based on an increase in gas pressure in the closed space, wherein expansion of the elastic member presses the mask
Implementation Method 4
a device for manufacturing a display panel that reflects a laser beam irradiated to a surrounding area other than the micro-LED
Data Source
AI summary
A device for manufacturing a display panel includes a support portion on which a display substrate is mounted. The device includes a mask defining an opening corresponding to a transmission area of the laser beam, and a pressing portion including a pressing member configured to press against the mask. The device includes a laser irradiation portion disposed in a front surface of the support portion and configured to irradiate the display substrate with laser light through the mask. The mask includes a base layer configured to transmit laser light, and a light blocking pattern layer disposed on the base layer and including the opening.


