Micro-LED Silicide Electrodes for Bowed Substrate Alignment
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Solution Overview
Problem
The manufacturing of micro-LED display apparatus is hindered by defects caused by the bowing phenomenon of growth substrates, leading to positional biases and size inconsistencies in electrode formation, resulting in operational defects such as non-emitting light areas on the display.
Innovation Solution
A light-emitting device with a nitride semiconductor structure, including a first and second semiconductor layer, an active layer, and a passivation pattern, where the electrodes are formed using a silicide alloy through a self-aligning process without an exposure step, reducing the number of process steps and minimizing defects by eliminating the need for a separate exposure process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional electrode formation process with exposure step is used, then the electrode can be formed on the growth substrate, but the bowing phenomenon of the growth substrate causes positional biases and size inconsistencies in electrode formation
Solution Approach 1:
The patent extracts and eliminates the exposure process step from the conventional electrode formation sequence. By using a self-aligning process where the electrode pattern is directly transferred without exposure, the method removes the source of positioning errors caused by substrate bowing, thereby improving manufacturing precision while simplifying the overall process
Solution Approach 2:
The electrode formation process utilizes self-alignment mechanisms where the electrode pattern automatically conforms to the growth substrate features without requiring external alignment through exposure. This self-service approach compensates for substrate bowing inherently, maintaining precision without additional process complexity
2Stability of the object's composition
If the growth substrate is restored to a flat state, then the bowing phenomenon is corrected, but the restoration process is irregular and may cause additional defects
Solution Approach 1:
The patent performs preliminary actions by forming the electrode pattern before the substrate bowing becomes problematic. The self-aligning process captures the electrode positions while the substrate is in its current state, avoiding the need for subsequent restoration that could introduce irregularities and additional defects
Solution Approach 2:
Instead of attempting to correct the substrate bowing (which may cause irregular restoration), the patent converts the potential harm into a benefit by designing an electrode formation process that is inherently tolerant of or adaptive to the bowed substrate state, thereby eliminating restoration-related defects
3Area of stationary object
If micro-LED display apparatus are arranged in first and second horizontal directions to implement large-area tiling, then the display area is increased, but the manufacturing defects due to bowing phenomenon increase
Solution Approach 1:
The patent applies segmentation by dividing the large-area tiling display into multiple micro-LED units, each formed using the self-aligning electrode process. This segmentation allows each unit to be manufactured with high precision independently, and the overall large area is achieved through assembly of these precise segments, preventing defect accumulation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces manufacturing defects, optimizes the process by eliminating the exposure step, and enhances luminous efficiency by increasing current injection, thereby reducing power consumption and improving the reliability of the light-emitting device.
Implementation Method 1
electrodes are formed using a silicide alloy through a self-aligning process without an exposure step
Implementation Method 2
a light-emitting device includes a nitride semiconductor structure including a first semiconductor layer, an active layer on the first semiconductor layer, and a second semiconductor layer on the active layer
Data Source
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AI summary
A light-emitting device, a display apparatus including the same and method for manufacturing the device and apparatus are disclosed. The light-emitting device includes (120, 220, 320) a first semiconductor layer (105, 205, 305), an active layer (110, 210, 310) on the first semiconductor layer, and a second semiconductor layer (115, 215, 315) on the active layer; a passivation pattern (125, 225, 325) on an outer surface of the nitride semiconductor structure; a first electrode (140, 240, 340) connected to the first semiconductor layer; and a second electrode (145, 245, 345) spaced apart from the first electrode and connected to the second semiconductor layer, wherein each of the first electrode and the second electrode includes a silicide alloy. Accordingly, the defect in manufacturing the electrode of the light-emitting device due to the bowing phenomenon of the growth substrate may be removed.