Micromanipulator Stacking for TEM Sample Throughput
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Solution Overview
Problem
The existing methods for preparing TEM samples are time-consuming and labor-intensive, especially when multiple samples need to be extracted and analyzed from a semiconductor wafer, as they require serial processing and destruction of the original sample, limiting their practicality for high-volume manufacturing process control.
Innovation Solution
A method that allows for the efficient extraction and stacking of multiple TEM samples using a micromanipulator, which attaches samples electrostatically or through FIB deposition, enabling simultaneous pickup and drop-off onto a TEM sample holder, reducing the number of steps and motions required, thereby increasing throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If traditional serial sample extraction and transfer methods are used, then sample preparation can be completed with simple equipment, but the process is extremely time-consuming and labor-intensive
Solution Approach 1:
The patent combines multiple sample extraction and transfer operations into a single parallel process. Multiple samples are extracted simultaneously from the substrate and transferred to the TEM holder in one coordinated operation, transforming the traditional serial process into a parallel one that dramatically increases throughput and reduces preparation time
Solution Approach 2:
The patent performs preliminary positioning and preparation of multiple samples on the substrate before extraction. Samples are pre-positioned at specific locations that facilitate simultaneous extraction and transfer operations, allowing the system to optimize the entire multi-sample process in advance rather than handling each sample individually
2Measurement precision
If multiple samples are extracted and analyzed from a semiconductor wafer for manufacturing process control, then comprehensive process monitoring is achieved, but the serial processing and sample destruction limit practicality
Solution Approach 1:
The patent segments the multi-sample extraction process into distinct operational phases: simultaneous extraction of multiple samples from predetermined locations, coordinated transfer to the TEM holder, and systematic analysis. This segmentation allows each phase to be optimized independently while maintaining overall process efficiency and comprehensive process control
Solution Approach 2:
The patent introduces an intermediary robotic system that acts as a mediator between the substrate and TEM holder. This robotic intermediary performs the complex coordinated operations of extracting multiple samples simultaneously and transferring them to the holder, enabling comprehensive process control without the limitations of manual serial processing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the time required for sample preparation and transfer, from days or weeks to minutes, enhancing the practicality of TEM analysis for manufacturing process control by enabling rapid processing of multiple samples.
Implementation Method 1
moving a manipulator into contact with a first lamella attaching the first lamella to the manipulator
Implementation Method 2
moving the manipulator so that the first lamella is in contact with a second lamella, which attaches the second lamella to the first lamella
Implementation Method 3
attaches samples electrostatically or through FIB deposition
Data Source
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AI summary
An improved method for extracting and handling multiple samples for S/TEM analysis is disclosed. Preferred embodiments of the present invention make use of a micromanipulator that attaches multiple samples at one time in a stacked formation and a method of placing each of the samples onto a TEM grid. By using a method that allows for the processing of multiple samples, the throughput of sample prep in increased significantly.