Micromechanical Window Structure with Inclined Plane and Moth Eye Coating
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Solution Overview
Problem
Existing methods for manufacturing micromechanical window structures are inefficient and prone to damage, particularly when used with MEMS components like micromirrors, as they require separate window insertion and adhesives, and do not effectively prevent diffraction reflexes or enhance transparency.
Innovation Solution
A method involving a substrate with recessed areas on both sides, where a coating forms a hermetically sealed window with an inclined plane shape, exposed by ultrashort pulse laser processing, and optionally featuring nitride and oxide undercoatings and a moth eye structure for enhanced transparency and reduced reflection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate window insertion with adhesives is used, then window protection is achieved, but manufacturing complexity and damage risk increase
Solution Approach 1:
The window structure is integrated directly into the substrate by forming recesses and filling them with window material, merging the window and substrate into a single unified structure. This eliminates the need for separate insertion steps and adhesives, reducing manufacturing complexity while maintaining protective functionality.
Solution Approach 2:
Recesses are formed in the substrate before the window material is applied, preparing the substrate in advance to receive and secure the window material. This preliminary structuring enables automatic mechanical interlocking and hermetic sealing without requiring subsequent adhesive application or complex assembly operations.
2Ease of manufacture
If flat window surface is used, then manufacturing is simple, but diffraction reflexes occur
Solution Approach 1:
The window surface is given an inclined orientation relative to the substrate surface, creating an asymmetric geometry that deflects light away from the optical path. This asymmetric inclination prevents first-order diffraction reflexes from appearing in the center of micromirrors while maintaining relatively simple manufacturing through standard recess formation techniques.
3Reliability
If coating is fully covered, then hermetic sealing is achieved, but light transmission is blocked
Solution Approach 1:
The coated surface is segmented into covered and exposed regions. The recess areas are filled with window material that remains exposed to allow light transmission, while the surrounding elevated coating areas provide hermetic sealing. This segmentation enables both functions to coexist in the same window structure.
Solution Approach 2:
Different regions of the window structure have different properties: elevated regions have complete coating for hermetic sealing, while recessed regions have exposed window material for light transmission. This local differentiation of quality allows the window to simultaneously achieve both hermetic sealing and optical functionality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables cost-effective, damage-resistant, and transparent micromechanical window structures suitable for MEMS components, preventing diffraction reflexes and improving light transmission, while eliminating the need for separate window insertion and adhesives.
Implementation Method 1
the formation of the first recess is carried out with the aid of ultrashort pulse lasers. This ensures a high evenness of the surface of the recess since the removed material does not melt, but directly evaporates
Data Source
AI summary
A manufacturing method for a micromechanical window structure including the steps: providing a substrate, the substrate having a front side and a rear side; forming a first recess on the front side; forming a coating on the front side and on the first recess; and forming a second recess on the rear side, so that the coating is at least partially exposed, whereby a window is formed by the exposed area of the coatings.