Micromirror Diaphragm Mass Reduction for Vibration Robustness
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Solution Overview
Problem
Micromechanical components face challenges in maintaining robustness and shock resistance due to undesired oscillations caused by vibrations, particularly in applications like vehicles where frequent vibrations and shock are common.
Innovation Solution
A micromechanical component design featuring a micromirror with a reflective surface partially constructed on a diaphragm, which reduces the mass of the micromirror, thereby minimizing undesired oscillations, and includes a layer stack of silicon oxide and silicon nitride for mechanical stress, along with a conductor loop for magnetic actuation, mounted via springs or a frame structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the micromirror mass is reduced by constructing the reflective surface on a thin diaphragm, then vibration robustness and shock resistance are improved, but the mechanical strength and stability of the micromirror structure deteriorate
Solution Approach 1:
The patent employs a composite layer stack structure consisting of multiple layers including silicon oxide, silicon nitride, and metal layers. This composite structure provides both mechanical strength and flexibility, allowing the thin diaphragm to maintain structural integrity while keeping the overall mass low for improved vibration and shock resistance.
Solution Approach 2:
The patent optimizes the thickness parameters of individual layers in the diaphragm structure. By carefully controlling the thickness of each layer (e.g., silicon oxide layer thickness of 1-5 μm, silicon nitride layer thickness of 0.5-2 μm), the design achieves the right balance between mechanical strength and low mass, enabling the micromirror to withstand vibrations and shocks while maintaining structural stability.
2Reliability
If the diaphragm thickness is reduced to minimize micromirror mass, then vibration robustness is improved, but the structural stability and stress resistance deteriorate
Solution Approach 1:
The multi-layer composite diaphragm structure with silicon oxide, silicon nitride, and metal layers provides enhanced structural stability despite the thin overall thickness. Each material contributes different mechanical properties that collectively improve shock resistance while maintaining structural integrity.
Solution Approach 2:
The patent applies different materials and thicknesses at different locations and layers of the diaphragm structure. The silicon oxide provides a rigid base layer, while the silicon nitride and metal layers provide flexibility and stress distribution, creating local quality variations that optimize both shock resistance and structural stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances vibration and shock resistance, allowing reliable operation in environments with frequent vibrations or high shock risk, such as vehicles, by reducing spurious oscillations and maintaining functional integrity.
Implementation Method 1
the mounted diaphragm includes a layer stack of at least one silicon oxide layer and at least one silicon nitride layer covering the at least one adjacent silicon oxide layer
Implementation Method 2
at least one conductor loop and/or coil, which can be supplied with current, is developed on the first diaphragm surface, on the second diaphragm surface, and/or in the diaphragm
Data Source
AI summary
A micromechanical component includes a micromirror connected to a mounting support via at least one spring such that the micromirror is adjustable about at least one axis of rotation relative to the mounting support, where the micromirror includes a reflective surface developed at least partially on a first diaphragm surface of a mounted diaphragm of the micromirror, the diaphragm including a second diaphragm surface that faces away from the first diaphragm surface and that is mounted in air or vacuum.