Micromirror Two-Axis Rotation via Movable Beams
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Solution Overview
Problem
Conventional micromirror devices are unable to perform two-axis rotation with adjacent mirrors spaced at intervals of 20 μm or less, which is necessary for wavelength selective switches to effectively guide demultiplexed light signals, as the mirror rotation axes are fixed by the size of the connectors, preventing efficient optical signal switching.
Innovation Solution
A micromirror device design featuring movable beams with one end fixed and the other end displaceable, allowing the mirror to rotate about two axes by displacement of these beams, enabling two-axis rotation even at narrow intervals through the use of flexible connectors and strategically placed driving electrodes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If conventional micromirror devices use fixed connectors to define mirror rotation axes, then the structure is simple and easy to manufacture, but the interval between adjacent mirrors must be large (greater than 20 μm), preventing effective wavelength selective switching
Solution Approach 1:
The patent applies the dynamics principle by transforming the fixed rotation axis defined by rigid connectors into a movable rotation axis. The rotation axis now moves together with the mirror through the displacement of the first and second movable beams, allowing the mirror to rotate about two different axes while maintaining narrow intervals between adjacent mirrors. This dynamic adjustment resolves the contradiction by enabling compact mirror spacing without sacrificing rotational functionality.
Solution Approach 2:
The patent segments the rotation support function into two independent movable beams (first movable beam and second movable beam) instead of using a single fixed connector. Each beam can displace independently to enable rotation about different axes, allowing the mirror to achieve two-axis rotation capability while maintaining small intervals between adjacent mirrors in the micromirror array.
2Productivity
If mirrors are spaced at narrow intervals (20 μm or less) for wavelength selective switching, then optical signal guiding efficiency improves, but conventional devices cannot achieve two-axis rotation necessary for efficient switching
Solution Approach 1:
By making the rotation axis dynamic and movable through the displacement mechanisms of the two movable beams, the system enables effective two-axis rotation even when mirrors are spaced at narrow intervals of 20 μm or less. This allows the micromirror array to maintain high optical signal switching efficiency while preserving full rotational capability for wavelength selective switching operations.
3Adaptability or versatility
If the mirror rotation axis is fixed by connector size, then manufacturing is simplified, but the mirror cannot rotate about two different axes simultaneously, limiting wavelength selective switching capability
Solution Approach 1:
The rotation support function is segmented into two independent movable beams instead of a single fixed connector. This segmentation allows each beam to be relatively simple in structure while collectively providing two-axis rotation capability, maintaining manufacturing simplicity while achieving enhanced rotational versatility for wavelength selective switching.
Solution Approach 2:
The two movable beams serve multiple functions: they support the mirror, enable rotation about the first axis through displacement of the first movable beam, enable rotation about the second axis through displacement of the second movable beam, and allow the rotation axis to move together with the mirror. This multi-functionality achieves versatile multi-axis rotation without significantly increasing manufacturing complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables two-axis rotation of mirrors at narrow intervals, allowing for efficient optical signal switching and guiding of demultiplexed light signals, thereby addressing the limitations of conventional micromirror devices in wavelength selective switches.
Implementation Method 1
a first movable beam 182a and a second movable beam 182b each having one end fixed to a frame portion 181 and the other end displaceable, the first movable beam 182a and the second movable beam 182b being arrayed in a line at a predetermined distance while the other end of the first movable beam 182a faces the other end of the second movable beam 182b
Data Source
AI summary
A movable beam (182a) and a movable beam (182b) each having one end fixed to a frame portion (181) of a mirror substrate (108) are provided inside the frame portion (181). The movable beam (182a) and the movable beam (182b) each having one end fixed to a corresponding to one of two opposite inner sides of the frame portion (181) are aligned at a predetermined distance on the same line in the direction in which the two sides face each other. Each of the movable beam (182a) and the movable beam (182b) has the other end displaceable in the normal line direction of the mirror substrate (108) and therefore has a cantilever structure. A mirror (183) is arranged between the movable beam (182a) and the movable beam (182b) and connected to them via a pair of connectors (109a, 109b).