Micromirror Device with Nested Cantilevers for Large Deflection
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Solution Overview
Problem
Micromirror devices for quasi-static mirror movement face challenges in achieving large deflection angles while maintaining a small spatial extent, resulting in limited achievable deflection angles and increased area occupancy.
Innovation Solution
The design incorporates a mirror surrounded by first and second bending cantilevers that run circumferentially and overlap in the radial direction, with actuators defining deformable bending segments to enable controlled elastic deformation, allowing for efficient quasi-static mirror movement with reduced area occupancy and enhanced deflection capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If bending cantilevers are designed with extended spatial configuration (e.g., meander-shaped) to improve deflection angles, then achievable deflection angles increase, but area occupancy increases
Solution Approach 1:
The patent implements nesting by placing the second bending cantilever inside the first bending cantilever, where both cantilevers share overlapping radial spaces. This nested configuration allows the system to achieve large deflection angles through the combined action of two cantilevers while maintaining a compact footprint, effectively resolving the contradiction between deflection angle and area occupancy.
Solution Approach 2:
The patent transitions from planar extensions to radial overlapping by configuring both bending cantilevers to extend circumferentially around the mirror and overlap in the radial direction. This dimensional reorganization allows the cantilevers to achieve extended effective lengths for large deflection angles without proportionally increasing the device's planar footprint.
2Length of moving object
If bending cantilevers are made longer to achieve larger deflection angles, then deflection angles improve, but device footprint increases
Solution Approach 1:
The patent implements nesting by placing the second bending cantilever inside the first bending cantilever, where both cantilevers share overlapping radial spaces. This nested configuration allows the system to achieve large deflection angles through the combined action of two cantilevers while maintaining a compact footprint, effectively resolving the contradiction between deflection angle and area occupancy.
Solution Approach 2:
The patent transitions from planar extensions to radial overlapping by configuring both bending cantilevers to extend circumferentially around the mirror and overlap in the radial direction. This dimensional reorganization allows the cantilevers to achieve extended effective lengths for large deflection angles without proportionally increasing the device's planar footprint.
3Shape
If multiple actuators are added to increase deflection capability, then deflection angles improve, but device complexity increases
Solution Approach 1:
The patent merges the functions of multiple actuators by having them work in coordinated pairs, where each pair controls one bending cantilever. The actuators are integrated with the cantilever structure, with each actuator defining a bending segment on its respective cantilever. This merging approach achieves enhanced deflection capability while managing complexity through functional integration.
Solution Approach 2:
Each actuator-cantilever pair serves multiple functions: it provides both structural support and active deformation capability. The bending cantilevers themselves serve as both mechanical elements and actuation elements, reducing the need for separate actuator mechanisms and thereby managing system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for large mirror deflections with a small footprint, achieving a high fill factor and efficient deformation, thereby overcoming the limitations of existing micromirror devices in terms of area occupancy and deflection angles.
Implementation Method 1
the bending cantilevers each connecting the mirror to a holder for moving, in particular pivoting and/or translational displacing, the mirror relative to the holder by elastic deformation of the bending cantilevers
Implementation Method 2
each of the actuators defining a bending segment on the respective bending cantilever, which bending segment is elastically deformable with the respective actuator upon activation of the actuator
Data Source
Figure 1~2
Figure 3~6
Figure 7~10
AI summary
The invention concerns a micromirror device for quasi-static mirror movement, comprising a mirror (2), a first bending cantilever (3) and a second bending cantilever (4), the bending cantilevers each connecting the mirror to a holder (5) wherein each of the bending cantilevers is mechanically coupled to one or more actuators (6), each of the actuators (6) defining a bending segment (7) on the respective bending cantilever, which bending segment is elastically deformable with the respective actuator (6); wherein the first bending cantilever (3) and second bending cantilever (4) each run at least in sections along a circumference around the mirror (2) so that the mirror is circumferentially enclosed by the two bending cantilevers, wherein in a radial direction of the mirror (2) the first bending cantilever (3) and the second bending cantilever (4) overlap each other at least in sections