Microscope Carrier Assembly with Dual-Axis Gear Rotation
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Solution Overview
Problem
Conventional microscope carrier platforms are limited in their rotational range, restricting the angle of incident particle beam exposure, which hampers 3D tomographic analysis and full-angle processing in scanning electron microscope (SEM) and focused ion beam (FIB) systems.
Innovation Solution
A carrier assembly comprising a base, first and second gear elements, an object-carrier, and a fixing part, where the first gear element is rotatably disposed on the base and meshed with the second gear element, allowing the object-carrier to rotate up to 360 degrees, enabling full-angle exposure to the particle beam.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a conventional carrier platform is used, then the structure is simple, but the rotational angle range is limited to less than 100 degrees
Solution Approach 1:
The carrier assembly is divided into multiple independent rotational stages: a first rotating stage for rotating the object-carrier around the Z-axis, and a second rotating stage for rotating the entire carrier platform around the X-axis. This segmentation allows each stage to contribute to the total rotational range, achieving over 360 degrees without requiring a single complex rotating mechanism.
Solution Approach 2:
The first rotating stage (object-carrier on Z-axis) is nested within the second rotating stage (carrier platform on X-axis). The object-carrier rotates on the Z-axis while being carried by the platform that rotates on the X-axis, creating a nested rotational structure that multiplies the effective angular range.
2Loss of information
If the carrier platform rotates with angle restriction, then the device complexity is low, but the data collection for SEM tomography is restricted
Solution Approach 1:
The carrier assembly transitions from a static or single-degree-of-freedom rotation to a dynamic multi-degree-of-freedom rotational system. The object-carrier can rotate 360 degrees on the Z-axis while the carrier platform simultaneously rotates on the X-axis, enabling comprehensive multi-angle data collection for complete tomographic reconstruction.
Solution Approach 2:
The system adds another rotational dimension by introducing the X-axis rotation of the carrier platform in addition to the Z-axis rotation of the object-carrier. This dimensional expansion transforms the rotation from a single-plane movement to a multi-planar rotational capability, enabling full 360-degree coverage.
3Adaptability or versatility
If the object is radiated within a limited angle range, then the carrier structure is simple, but the FIB-based full-angle lateral object processing is restricted
Solution Approach 1:
The rotational capability is segmented into two independent axes: Z-axis rotation for lateral positioning and X-axis rotation for angular orientation. This segmentation allows the system to achieve full-angle lateral processing by coordinating rotations on both axes, rather than relying on a single limited rotation.
Solution Approach 2:
The dual-rotation carrier assembly serves multiple functions: it enables both SEM tomography with complete 360-degree coverage and FIB full-angle lateral processing. The same mechanical structure supports different microscopy techniques and processing requirements, making the system universally applicable.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables enhanced 3D tomographic analysis and full-angle processing capabilities by allowing the object to be radiated by the particle beam at various angles, improving data collection and processing efficiency in microscope systems.
Implementation Method 1
The second gear element is rotatably disposed on the base and meshed with the first gear element
Data Source
AI summary
A carrier assembly and an operation method thereof are provided. The carrier assembly comprises a base, a first gear element, a second gear element, an object-carrier and a fixing part. The first gear element is rotatably disposed on the base, and the second gear element is rotatably disposed on the base and meshed with the first gear element. The object-carrier is used for carrying an object. The fixing part connects the base to a carrier platform. Wherein, an included angle is contained between the rotating axis of the first gear element and the rotating axis of the second gear element.