Microscope Objective Adapter for Semiconductor Probe Integration
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Solution Overview
Problem
Current microscopes lack an efficient adapter system for conducting comprehensive measurements on semiconductors and thin film materials, such as electrical, mechanical, optical, chemical, and structural measurements.
Innovation Solution
The development of an objective adapter that integrates a manipulator and a probe head with a microscope, allowing for precise positioning of a probe tip to contact the sample while under observation, enabling a wide range of measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If microscopes are adapted with various modalities such as electron-dispersive X-ray spectroscopy systems, atomic force microscope adapters, nanoprobing systems, then the measurement capability and value of the microscope is improved, but the cost and complexity of the microscope increases
Solution Approach 1:
The adapter enables a single microscope to perform multiple measurement functions (electrical, mechanical, optical, chemical, and structural measurements) by integrating a manipulator with probe capabilities directly onto the microscope objective, eliminating the need for separate specialized systems
Solution Approach 2:
The patent combines the manipulator and probe head directly onto the microscope objective holder, merging previously separate systems (microscope, manipulator, probe) into a single integrated unit that reduces overall system complexity while maintaining multi-functionality
2Adaptability or versatility
If a manipulator and probe head are integrated with the microscope objective adapter, then the ability to perform comprehensive measurements on semiconductors and thin film materials is improved, but the device complexity increases
Solution Approach 1:
The integrated adapter system provides universal measurement capabilities for semiconductors and thin film materials, allowing a single device to perform electrical, mechanical, optical, chemical, and structural measurements through different probe configurations
Solution Approach 2:
The probe head is integrated within the manipulator assembly, which is itself mounted on the microscope objective adapter, creating a nested configuration where smaller components are housed within larger structures to minimize space and complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This adapter system enhances the capability of microscopes to perform detailed measurements on semiconductors and thin film materials, improving the understanding and characterization of these materials.
Implementation Method 1
The platen is made of a material that attracts a magnet or a magnetic material
Implementation Method 2
an objective, and the objective is connected to a microscope to enable observation of a sample
Implementation Method 3
Probing the sample may enable a wide variety of measurements, such as electrical, mechanical, optical, chemical, and structural measurements of thin film materials and semiconductors
Data Source
AI summary
An objective adapter comprising of a frame, a frame cover, an opening to insert an objective, and a platen is provided. A manipulator that houses a probe chip is placed on the platen. The probe chip is used to perform electrical, mechanical, optical, chemical, and structural measurements of thin film materials and semiconductors. The objective adapter mounts onto microscopes, including 3rd party microscopes.