Charged Particle Microscope Transfer Optics for Lorentz Mode
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Solution Overview
Problem
Current microscope systems face challenges in optimizing performance across multiple modes of operation, as improvements in one mode often compromise performance in another, particularly in standard and Lorentz modes, due to limitations in aberration correction and lens configurations.
Innovation Solution
Incorporating a second transfer lens between the corrector and the first transfer lens in charged particle microscopes, allowing for optimized performance in both standard and Lorentz modes by tuning C5 aberration and defocus, while minimizing the impact on C s and C 7 aberrations, and providing additional flexibility in aberration correction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a single transfer lens configuration is used, then the microscope can operate in standard mode, but performance in Lorentz mode is compromised due to inability to optimally tune C5 aberration and defocus
Solution Approach 1:
The single transfer lens is divided into two separate transfer lenses (first transfer lens and second transfer lens) positioned at different locations in the optical path. This segmentation allows each lens to be independently optimized for different aberration corrections, enabling the system to achieve optimal performance in both standard mode and Lorentz mode without compromising either mode.
2Measurement precision
If microscope components are improved to increase performance in one mode, then resolution and magnification improve in that mode, but performance in the other mode deteriorates
Solution Approach 1:
The dual transfer lens configuration creates a universal optical system that can optimally function in both standard mode and Lorentz mode. The first transfer lens handles aberration correction for standard mode operation, while the second transfer lens provides additional degrees of freedom for optimizing Lorentz mode performance, including tuning C5 aberration and defocus. This multi-functional design allows the microscope to maintain high resolution and performance across different operating modes without compromise.
3Manufacturing precision
If aberration correction is optimized for standard mode, then C s and C 7 aberrations are minimized, but C5 aberration and defocus cannot be optimally tuned for Lorentz mode
Solution Approach 1:
The system employs dynamically adjustable transfer lenses that can be independently controlled to adapt to different operating modes. The first transfer lens maintains optimal aberration correction for standard mode, while the second transfer lens provides dynamic tuning capability for C5 aberration and defocus in Lorentz mode. This dynamic configuration allows the system to switch between modes and optimize performance for each mode independently.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables charged particle microscopes to maintain optimal performance in both standard and Lorentz modes, reducing higher-order aberrations and thermal magnetic field noise, and allowing for optimal performance across a range of accelerating voltages, thereby enhancing resolution and imaging capabilities.
Implementation Method 1
a corrector for correcting axial aberrations
Implementation Method 2
a Lorentz lens located between the corrector and the sample holder
Implementation Method 3
an objective lens between the Lorentz lens and the sample holder
Implementation Method 4
a first transfer lens positioned between the corrector and the Lorentz lens, and a second transfer lens positioned between the corrector and the first transfer lens
Data Source
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AI summary
Charged particle microscopes having an optimized performance across multiple modes of operation are disclosed herein. More specifically, the disclosure includes improved charged particle microscopes that increase and/or optimize the performance of the microscope in both a standard mode of operation and a Lorentz mode of operation. The charged particle microscopes include an extra transfer lens between a corrector and the traditional transfer lens which allows for the flexibility to optimize performance in both the standard mode of operation and the Lorentz mode of operation. For example, in a Lorentz mode of operation, improved charged particle microscope according to the present disclosure can be used to tune the C5 aberration, while hardly affecting defocus and/or Cs aberrations. Additionally, the inclusion of the extra transfer lens provides the charged particle microscopes disclosed herein with an extra degree of freedom with which to zero defocus and total Cs and C5.