Microstructures Prevent Underfill Overflow in Semiconductor Packaging

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Solution Overview

Problem

In semiconductor packaging, existing technologies face challenges in controlling the flow and application of underfill materials, leading to potential interference with integrated circuit die attachments and thermal dissipation issues due to overflow and improper distribution.

Innovation Solution

The implementation of microstructures, such as bumps or pillars with hydrophobic insulating materials, disposed proximate to the integrated circuit die mounting region on a substrate, which prevent the underfill material from spreading and ensure controlled application, thereby maintaining air gaps for improved thermal performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If underfill material is applied to fill gaps between substrate and integrated circuit die, then voids and defects are reduced, but underfill material may overflow and interfere with die attachment and thermal dissipation

Engineering Contradiction:
Improveattachment qualityVSAvoidunderfill overflow
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent applies a hydrophobic coating specifically to the die mounting region where underfill application occurs, creating localized water-repellent properties. This local treatment prevents underfill overflow at the critical mounting area while allowing underfill to properly fill gaps in other regions, thus resolving the contradiction between reliable attachment and preventing harmful overflow.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the surface energy parameter of the die mounting region by applying a hydrophobic coating. This parameter change causes the underfill material to bead up and prevent overflow, while still allowing proper capillary flow into gaps for void reduction. The parameter change resolves the contradiction by modifying surface properties rather than changing the fundamental underfill application process.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If minimum feature size is reduced to increase integration density, then more components are integrated per area, but package size must be reduced which complicates underfill control

Engineering Contradiction:
Improveintegration densityVSAvoidunderfill application control
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The hydrophobic coating is applied specifically to the die mounting region, creating localized control over underfill behavior. This local treatment enables precise underfill application control in the critical area without affecting other regions, thus supporting high integration density while maintaining manufacturing precision for underfill application.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The hydrophobic coating acts as an intermediary layer between the underfill material and the die mounting region. This intermediary prevents direct adhesion of underfill to the mounting area, controlling overflow while allowing proper gap filling, thus enabling precise underfill application control that supports high integration density packaging.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Temperature

If air gaps are maintained for thermal dissipation, then thermal performance is improved, but gaps must be precisely controlled which complicates underfill application

Engineering Contradiction:
Improvethermal dissipationVSAvoidgap control
Core Design Contradiction:
TemperatureVSManufacturing precision

Solution Approach 1:

The hydrophobic coating is applied specifically to regions where gap maintenance is critical for thermal dissipation. This local treatment ensures that air gaps are maintained in thermal-critical areas while allowing underfill to properly fill non-critical gaps, thus improving thermal performance without requiring precision control across the entire substrate surface.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The hydrophobic coating serves as an intermediary that prevents underfill from intruding into air gap regions. This intermediary layer maintains the integrity of thermal dissipation pathways by preserving air gaps where needed, while still allowing underfill to fill gaps in non-thermal-critical areas, thus improving thermal performance without compromising manufacturing feasibility.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively controls underfill material distribution, preventing overflow and ensuring proper attachment of integrated circuit dies while maintaining air gaps for enhanced thermal dissipation and assembly yields.

Implementation Method 1

The plurality of microstructures comprises conductive material and an outer insulating layer disposed over the conductive material. The outer insulating layer prevents contact between the underfill material and the conductive material.

Methodology Applied
Scientific EffectHydrophobic effect: Hydrophobe

Data Source

PatentUS9837346B2Packaging device having plural microstructures disposed proximate to die mounting region
Publication Date: 2017.12.05 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US9837346B2 patent drawing
  • US9837346B2 patent drawing
  • US9837346B2 patent drawing

AI summary

An example method includes providing a packaging device includes a substrate having an integrated circuit die mounting region. A plurality of microstructures, each including an outer insulating layer over a conductive material, are disposed proximate a side of the integrated circuit die mounting region. An underfill material is disposed between the substrate and the integrated circuit die, the microstructures preventing spread of the underfill. In another example method, a via can be formed in a substrate and the substrate etched to form a bump or pillar from the via. An insulating material can be formed over the bump or pillar. In another example method, a photoresist deposited over a seed layer and patterned to form openings. A conductive material is plated in the openings, forming a plurality of pillars or bumps. The photoresist and exposed seed layer are removed. The conductive material is oxidized to form an insulating material.